Korzeniewska Ewa, Tomczyk Mariusz, Walczak Maria
Institute of Electrical Engineering Systems, Faculty of Electrical Engineering, Electronics, Computer and Control Engineering, Lodz University of Technology, 90-924 Łódź, Poland.
Sensors (Basel). 2020 Mar 30;20(7):1920. doi: 10.3390/s20071920.
For physical vapor deposition (PVD) technology, cleaning a substrate is one of the key preliminary processes before depositing the metal layer. In this article, we present the results of research on the modification of a textile composite substrate using laser technology and its influence on the surface resistance of silver structures intended for use in wearable electronics. As a result of the substrate modification, the resistance of the layers increased as compared with the structures produced on an unmodified substrate. An experimental planning technique was used to optimize the laser modification process.
对于物理气相沉积（PVD）技术而言，清洗基板是沉积金属层之前的关键预处理工艺之一。在本文中，我们展示了利用激光技术对纺织复合基板进行改性的研究结果，以及该改性对用于可穿戴电子产品的银结构表面电阻的影响。由于基板改性，与在未改性基板上制备的结构相比，各层的电阻增加了。采用实验规划技术对激光改性工艺进行了优化。
