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基于CuO/WO分级结构的快速响应微机电系统二甲苯气体传感器

Fast-response MEMS xylene gas sensor based on CuO/WO hierarchical structure.

作者信息

Guo Mengmeng, Luo Na, Chen Yang, Fan Yu, Wang Xiaohong, Xu Jiaqiang

机构信息

NEST Lab., Department of Physics, Department of Chemistry, College of Sciences, Shanghai University, Shanghai 200444, China.

NEST Lab., Department of Physics, Department of Chemistry, College of Sciences, Shanghai University, Shanghai 200444, China.

出版信息

J Hazard Mater. 2022 May 5;429:127471. doi: 10.1016/j.jhazmat.2021.127471. Epub 2021 Oct 9.

DOI:10.1016/j.jhazmat.2021.127471
PMID:35236018
Abstract

CuO/WO hierarchical hollow microspheres, assembled from irregular two dimensional (2D) nanosheets, were prepared by ultrasonic-wet chemical etching and pyrolysis in this study. The sensing performance of Micro-Electro-Mechanical System (MEMS) xylene gas sensor based on CuO/WO hierarchical structure were evaluated. It was found that the CuO/WO MEMS sensors showed an enhanced gas sensing performance compared with pristine WO sensor. The CuO/WO-3 (the mass ratio of CuO to WO is 3%) sensor exhibited faster response-recover speed and the highest response value to xylene. Moreover, the CuO/WO-3 sensor possessed higher selectivity and long-term stability. The good sensing properties can be attributed to the unique three dimensional (3D) hierarchical structure and p-n heterojunction of CuO-WO. Considering the above advantages, the CuO/WO-3 sensor has a great potential for the rapid detection and monitoring of xylene.

摘要

本研究通过超声湿化学蚀刻和热解制备了由不规则二维(2D)纳米片组装而成的CuO/WO分级空心微球。评估了基于CuO/WO分级结构的微机电系统(MEMS)二甲苯气体传感器的传感性能。结果发现,与原始WO传感器相比,CuO/WO MEMS传感器的气敏性能有所增强。CuO/WO-3(CuO与WO的质量比为3%)传感器对二甲苯表现出更快的响应恢复速度和最高的响应值。此外,CuO/WO-3传感器具有更高的选择性和长期稳定性。良好的传感性能可归因于CuO-WO独特的三维(3D)分级结构和p-n异质结。考虑到上述优点,CuO/WO-3传感器在二甲苯的快速检测和监测方面具有巨大潜力。

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