Yuan Kai-Ping, Zhu Li-Yuan, Yang Jia-He, Hang Cheng-Zhou, Tao Jia-Jia, Ma Hong-Ping, Jiang An-Quan, Zhang David Wei, Lu Hong-Liang
State Key Laboratory of ASIC and System, Institute of Advanced Nanodevices, School of Microelectronics, Fudan University, Shanghai 200433, China.
State Key Laboratory of ASIC and System, Institute of Advanced Nanodevices, School of Microelectronics, Fudan University, Shanghai 200433, China.
J Colloid Interface Sci. 2020 May 15;568:81-88. doi: 10.1016/j.jcis.2020.02.042. Epub 2020 Feb 15.
Development of high-performance ammonia (NH) sensor is imperative for monitoring NH in the living environment. In this work, to obtain a high performance NH gas sensor, structurally well-defined WO@SnO core shell nanosheets with a controllable thickness of SnO shell layer have been employed as sensing materials. The prepared core shell nanosheets were used to obtain a miniaturized gas sensor based on micro-electro-mechanical system (MEMS). By tuning the thickness of SnO layer via atomic layer deposition, a series of WO@SnO core-shell nanosheets with tunable sensing properties were realized. Particularly, the sensor base on the fabricated WO@SnO nanosheets with 20-nm SnO shell layer demonstrated superior gas sensing performance with the highest response (1.55) and selectivity toward 15 ppm NH at 200 °C. This remarkable enhancement of NH sensing ability could be ascribed to the formation of unique WO-SnO core-shell heterojunction structure. The detailed mechanism was elucidated by the heterojunction-depletion model with the help of specific band alignment.
开发高性能氨(NH₃)传感器对于监测生活环境中的NH₃至关重要。在这项工作中,为了获得高性能的NH₃气体传感器,具有结构明确且SnO₂壳层厚度可控的WO₃@SnO₂核壳纳米片被用作传感材料。所制备的核壳纳米片被用于基于微机电系统(MEMS)获得一种小型化气体传感器。通过原子层沉积调节SnO₂层的厚度,实现了一系列具有可调传感特性的WO₃@SnO₂核壳纳米片。特别地,基于具有20纳米SnO₂壳层的制备的WO₃@SnO₂纳米片的传感器在200℃下对15 ppm NH₃表现出优异的气敏性能,具有最高响应(1.55)和选择性。NH₃传感能力的这种显著增强可归因于独特的WO₃-SnO₂核壳异质结结构的形成。借助特定的能带排列,通过异质结耗尽模型阐明了详细机制。