Snieder Jelle, Dielen Marc, van Ostayen Ron A J
Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands.
Morphotonics B.V., De Run 4281, 5503 LM Veldhoven, The Netherlands.
Micromachines (Basel). 2022 Mar 18;13(3):461. doi: 10.3390/mi13030461.
Roll-to-plate nanoimprinting with flexible stamps is a fabrication method to pattern large-area substrates with micro- and nanotextures. The imprint consists of the preferred texture on top of a residual layer, of which the thickness and uniformity is critical for many applications. In this work, a numerical model is developed to predict the residual layer thickness (RLT) as a function of the imprint parameters. The model is based on elastohydrodynamic lubrication (EHL) theory, which combines lubrication theory for the pressure build-up in the resin film, with linear elasticity theory for the elastic deformation of the roller material. The model is extended with inextensible cylindrical shell theory to capture the effect of the flexible stamp, which is treated as a tensioned web. The results show that an increase in the tension of the web increases the effective stiffness of the roller, resulting in a reduction in the RLT. The numerical results are validated with layer height measurements from flat layer imprints. It is shown that the simulated minimum layer height corresponds very well with the experimental results for a wide range of resin viscosities, imprint velocities, and imprint loads.
使用柔性印模的滚压到平板纳米压印是一种在大面积基板上形成微纳纹理图案的制造方法。印记由残余层顶部的优选纹理组成，残余层的厚度和均匀性对许多应用至关重要。在这项工作中，开发了一个数值模型来预测残余层厚度（RLT）作为压印参数的函数。该模型基于弹流润滑（EHL）理论，该理论将树脂膜中压力建立的润滑理论与辊材料弹性变形的线性弹性理论相结合。该模型用不可伸长圆柱壳理论进行扩展，以捕捉柔性印模的影响，柔性印模被视为张紧的腹板。结果表明，腹板张力的增加会增加辊的有效刚度，从而导致RLT减小。数值结果通过平层印记的层高度测量进行验证。结果表明，对于广泛的树脂粘度、压印速度和压印载荷，模拟的最小层高度与实验结果非常吻合。
