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电子显微镜参数和样品厚度对高角度环形暗场成像的影响。

Effects of Electron Microscope Parameters and Sample Thickness on High Angle Annular Dark Field Imaging.

作者信息

Yang Pucheng, Li Zheng, Yang Yi, Li Rui, Qin Lufei, Zou Yunhao

机构信息

School of Materials Science and Engineering, Xiangtan University, Xiangtan, Hunan 411105, China.

出版信息

Scanning. 2022 Mar 20;2022:8503314. doi: 10.1155/2022/8503314. eCollection 2022.

DOI:10.1155/2022/8503314
PMID:35360524
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8958084/
Abstract

Scanning transmission electron microscopy (STEM) developed into a very important characterization tool for atomic analysis of crystalline specimens. High-angle annular dark field (HAADF) scanning transmission electron microscopy (STEM) has become one of the most powerful tools to visualize material structures at atomic resolution. However, the parameter of electron microscope and sample thickness is the important influence factors on HAADF-STEM imaging. The effect of convergence angle, spherical aberration, and defocus to HAADF imaging process has been analyzed through simulation. The applicability of two HAADF simulation software has been compared, and suggestions for their usage have been given.

摘要

扫描透射电子显微镜（STEM）已发展成为用于晶体样品原子分析的非常重要的表征工具。高角度环形暗场（HAADF）扫描透射电子显微镜（STEM）已成为以原子分辨率可视化材料结构的最强大工具之一。然而，电子显微镜参数和样品厚度是影响HAADF-STEM成像的重要因素。通过模拟分析了会聚角、球差和散焦对HAADF成像过程的影响。比较了两种HAADF模拟软件的适用性，并给出了使用建议。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e193/8958084/a61772afab0e/SCANNING2022-8503314.004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e193/8958084/cc601b7ac802/SCANNING2022-8503314.002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e193/8958084/337de57c4078/SCANNING2022-8503314.003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e193/8958084/a61772afab0e/SCANNING2022-8503314.004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e193/8958084/cc601b7ac802/SCANNING2022-8503314.002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e193/8958084/337de57c4078/SCANNING2022-8503314.003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e193/8958084/a61772afab0e/SCANNING2022-8503314.004.jpg

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本文引用的文献

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Composition determination of semiconductor alloys towards atomic accuracy by HAADF-STEM.通过高角度环形暗场扫描透射电子显微镜（HAADF-STEM）实现对半导体合金原子精度的成分测定。
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