Jung Eun Young, Park Choon-Sang, Jang Hyo Jun, Iqbal Shahzad, Hong Tae Eun, Shin Bhum Jae, Choi Muhan, Tae Heung-Sik
School of Electronic and Electrical Engineering, College of IT Engineering, Kyungpook National University, Daegu 41566, Korea.
Department of Electrical Engineering, Milligan University, Johnson City, TN 37682, USA.
Polymers (Basel). 2022 Apr 10;14(8):1535. doi: 10.3390/polym14081535.
This study systematically investigated an atmospheric pressure plasma reactor with a centered single pin electrode inside a dielectric tube for depositing the polyaniline (PANI) thin film based on the experimental case studies relative to variations in pin electrode configurations (cases I, II, and III), bluff-body heights, and argon (Ar) gas flow rates. In these cases, the intensified charge-coupled device and optical emission spectroscopy were analyzed to investigate the factors affecting intensive glow-like plasma generation for deposition with a large area. Compared to case I, the intense glow-like plasma of the cases II and III generated abundant reactive nitrogen species (RNSs) and excited argon radical species for fragmentation and recombination of PANI. In case III, the film thickness and deposition rate of the PANI thin film were about 450 nm and 7.5 nm/min, respectively. This increase may imply that the increase in the excited radical species contributes to the fragmentation and recombination due to the increase in RNSs and excited argon radicals during the atmospheric pressure (AP) plasma polymerization to obtain the PANI thin film. This intense glow-like plasma generated broadly by the AP plasma reactor can uniformly deposit the PANI thin film, which is confirmed by field emission-scanning electron microscopy and Fourier transform infrared spectroscopy.
本研究基于与针电极配置变化（案例I、II和III）、钝体高度和氩气（Ar）流速相关的实验案例研究，系统地研究了一种在介电管内带有中心单针电极的大气压等离子体反应器，用于沉积聚苯胺（PANI）薄膜。在这些案例中，对增强型电荷耦合器件和光发射光谱进行了分析，以研究影响大面积沉积时产生强烈辉光状等离子体的因素。与案例I相比，案例II和III的强烈辉光状等离子体产生了丰富的活性氮物种（RNSs）和激发的氩自由基物种，用于聚苯胺的碎片化和重组。在案例III中，聚苯胺薄膜的膜厚和沉积速率分别约为450 nm和7.5 nm/min。这种增加可能意味着，在大气压（AP）等离子体聚合过程中，由于RNSs和激发的氩自由基增加，激发自由基物种的增加有助于碎片化和重组，从而获得聚苯胺薄膜。由AP等离子体反应器广泛产生的这种强烈辉光状等离子体可以均匀地沉积聚苯胺薄膜，这通过场发射扫描电子显微镜和傅里叶变换红外光谱得到了证实。
