Cho Jonam, Shin Gunchul
School of Materials Science and Engineering, University of Ulsan, 12 Technosaneop-ro 55 beon-gil, Nam-gu, Ulsan 44776, Korea.
Polymers (Basel). 2022 Apr 11;14(8):1557. doi: 10.3390/polym14081557.
Thin-film microdevices can be applied to various wearable devices due to their high flexibility compared to conventional bulk-type electronic devices. Among the various microdevice types, many IoT-based sensor devices have been developed recently. In the case of such sensor elements, it is important to control the surrounding environment to optimize the sensing characteristics. Among these environmental factors, temperature often has a great influence. There are cases where temperature significantly affects the sensor characteristics, as is the case for gas sensors. For this purpose, the development of thin-film-type micro-heaters is important. For this study, a wirelessly driven thin-film micro-heater was fabricated on the flexible and stretchable elastomer, a polydimethylsiloxane (PDMS); the antenna was optimized; and the heater was driven at the temperature up to 102 degrees Celsius. The effect of its use on gas-sensing characteristics was compared through the application of the proposed micro-heater to a gas sensor. The heated SnO nanowire gas sensor improved the performance of detecting carbon monoxide (CO) by more than 20%, and the recovery time was reduced to less than half. It is expected that thin-film-type micro-heaters that can be operated wirelessly are suitable for application in various wearable devices, including those for smart sensors and health monitoring.
与传统的块状电子设备相比，薄膜微器件具有很高的柔韧性，因此可应用于各种可穿戴设备。在各种微器件类型中，最近已经开发出许多基于物联网的传感器设备。对于此类传感器元件，控制周围环境以优化传感特性非常重要。在这些环境因素中，温度往往有很大影响。温度会显著影响传感器特性的情况并不少见，气体传感器就是如此。为此，开发薄膜型微型加热器很重要。在本研究中，在柔性可拉伸弹性体聚二甲基硅氧烷（PDMS）上制作了一种无线驱动的薄膜微型加热器；对天线进行了优化；并且该加热器能在高达102摄氏度的温度下驱动。通过将所提出的微型加热器应用于气体传感器，比较了其使用对气体传感特性的影响。加热后的SnO纳米线气体传感器将一氧化碳（CO）的检测性能提高了20%以上，恢复时间缩短至不到原来的一半。预计可无线操作的薄膜型微型加热器适用于各种可穿戴设备，包括智能传感器和健康监测设备。
