Pühringer Gerald, Consani Cristina, Jannesari Reyhaneh, Fleury Clement, Dubois Florian, Spettel Jasmin, Dao Thang Duy, Stocker Gerald, Grille Thomas, Jakoby Bernhard
Institute for Microelectronics and Microsensors, Johannes Kepler University, 4040 Linz, Austria.
Silicon Austria Labs GmbH, 9524 Villach, Austria.
Sensors (Basel). 2022 Apr 13;22(8):2968. doi: 10.3390/s22082968.
In this work, we present and analyze a design of an absorber-waveguide system combining a highly sensitive waveguide array concept with a resonant selective absorber. The waveguide part is composed of an array of coupled strip waveguides and is therefore called a coupled strip array (CSA). The CSA is then coupled to the end of a slab Tamm plasmon (STP-) resonator, which is composed of a quasicrystal-like reflector formed by the patterning of a silicon slab and an interfacing tungsten slab. The concept describes an emitter-waveguide or waveguide-detector system featuring selective plasmon-enhanced resonant absorption or emission. These are crucial properties for corresponding optical on-chip integrated devices in context with evanescent field absorption sensing in fluids or gases, for example. Thus, the concept comprises a valuable and more cost-effective alternative to quantum cascade lasers. We designed the lateral dimensions of the STP resonator via a simple quasi-crystal approach and achieved strong narrowband resonances (emittance and -factors up to 85% and 88, respectively) for different silicon thicknesses and substrate materials (air and silicon oxide). Moreover, we analyze and discuss the sensitivity of the complete emitter-waveguide system in dependence on the slab thickness. This reveals the crucial correlation between the expected sensitivity assigned to the absorber-waveguide system and field confinement within the silicon.
在这项工作中，我们展示并分析了一种吸收器 - 波导系统的设计，该系统将高灵敏度波导阵列概念与共振选择性吸收器相结合。波导部分由耦合带状波导阵列组成，因此被称为耦合带状阵列（CSA）。然后，CSA与平板塔姆等离子体（STP -）谐振器的端部耦合，该谐振器由通过对硅平板和界面钨平板进行图案化形成的类准晶体反射器组成。该概念描述了一种具有选择性等离子体增强共振吸收或发射功能的发射器 - 波导或波导 - 探测器系统。例如，对于在流体或气体中进行倏逝场吸收传感的相应光学片上集成器件而言，这些都是关键特性。因此，该概念为量子级联激光器提供了一种有价值且更具成本效益的替代方案。我们通过一种简单的准晶体方法设计了STP谐振器的横向尺寸，并针对不同的硅厚度和衬底材料（空气和氧化硅）实现了强窄带共振（发射率和品质因数分别高达85%和88）。此外，我们分析并讨论了整个发射器 - 波导系统的灵敏度与平板厚度的关系。这揭示了分配给吸收器 - 波导系统的预期灵敏度与硅内场限制之间的关键相关性。
