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利用光学塔姆态的高选择性互补金属氧化物半导体兼容中红外热发射器/探测器平板设计

Highly Selective CMOS-Compatible Mid-Infrared Thermal Emitter/Detector Slab Design Using Optical Tamm-States.

作者信息

Pühringer Gerald, Jakoby Bernhard

机构信息

Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, 4040 Linz, Austria.

出版信息

Materials (Basel). 2019 Mar 20;12(6):929. doi: 10.3390/ma12060929.

DOI:10.3390/ma12060929
PMID:30897809
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6470626/
Abstract

In this work, we propose and evaluate a concept for a selective thermal emitter based on Tamm plasmons suitable for monolithic on-chip integration and fabrication by conventional complementary metal oxide semiconductor (CMOS)-compatible processes. The original design of Tamm plasmon structures features a purely one-dimensional array of layers including a Bragg mirror and a metal. The resonant field enhancement next to the metal interface corresponding to optical Tamm states leads to resonant emission at the target wavelength, which depends on the lateral dimensions of the bandgap structure. We demonstrate the application of this concept to a silicon slab structure instead of deploying extended one dimensional layers thus enabling coupling into slab waveguides. Here we focus on the mid-infrared region for absorption sensing applications, particularly on the CO₂ absorption line at 4.26 µm as an example. The proposed genetic-algorithm optimization process utilizing the finite-element method and the transfer-matrix method reveals resonant absorption in case of incident modes guided by the slab and, by Kirchhoff's law, corresponds to emittance up to 90% depending on different choices of the silicon slab height when the structure is used as a thermal emitter. Although we focus on the application as an emitter in the present work, the structure can also be operated as an absorber providing adjusted lateral dimensions and/or exchanged materials (e.g., a different choice for metal).

摘要

在这项工作中,我们提出并评估了一种基于塔姆等离激元的选择性热发射器概念,该发射器适用于通过传统互补金属氧化物半导体(CMOS)兼容工艺进行单片片上集成和制造。塔姆等离激元结构的原始设计具有纯一维层阵列,包括布拉格镜和金属。与光学塔姆态对应的金属界面附近的共振场增强导致在目标波长处的共振发射,该波长取决于带隙结构的横向尺寸。我们展示了这一概念在硅平板结构中的应用,而非部署扩展的一维层,从而实现与平板波导的耦合。在这里,我们专注于用于吸收传感应用的中红外区域,特别是以4.26 µm处的CO₂吸收线为例。所提出的利用有限元法和转移矩阵法的遗传算法优化过程表明,在平板引导的入射模式下存在共振吸收,并且根据基尔霍夫定律,当该结构用作热发射器时,取决于硅平板高度的不同选择,发射率可达90%。尽管我们在当前工作中专注于作为发射器的应用,但该结构也可以作为吸收器运行,只需调整横向尺寸和/或更换材料(例如,选择不同的金属)。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/63a8/6470626/8f807d4d16c8/materials-12-00929-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/63a8/6470626/7829bbc8ccc5/materials-12-00929-g0A1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/63a8/6470626/a81c88330055/materials-12-00929-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/63a8/6470626/6786a691536b/materials-12-00929-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/63a8/6470626/012ff1aeeedc/materials-12-00929-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/63a8/6470626/6d80a07ea6f3/materials-12-00929-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/63a8/6470626/a85f1d3d53e8/materials-12-00929-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/63a8/6470626/8f807d4d16c8/materials-12-00929-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/63a8/6470626/7829bbc8ccc5/materials-12-00929-g0A1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/63a8/6470626/a81c88330055/materials-12-00929-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/63a8/6470626/6786a691536b/materials-12-00929-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/63a8/6470626/012ff1aeeedc/materials-12-00929-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/63a8/6470626/6d80a07ea6f3/materials-12-00929-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/63a8/6470626/a85f1d3d53e8/materials-12-00929-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/63a8/6470626/8f807d4d16c8/materials-12-00929-g006.jpg

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引用本文的文献

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