Xu Chao, Liu Hong, Yang Shikuan
Institute for Composites Science Innovation, School of Materials Science and Engineering, Zhejiang University, Hangzhou, 310027, China.
Department of Medical Oncology, The first affiliated Hospital, Zhejiang University School of Medicine, Hangzhou, 310003, China.
Small Methods. 2022 Jun;6(6):e2200293. doi: 10.1002/smtd.202200293. Epub 2022 Apr 27.
Nanopatterns are important for applications in various nanodevice fields. Existing nanopatterning techniques mainly directly manufacture the nanopatterns through various lithographic methods, which usually are laborious, time-consuming, and need expensive equipment. Here, an extremely simple drawing at the nanoscale (DAN) concept to indirectly fabricate rational nanopatterns through controlling the macroscopic movement of the substrate , is demonstrated. The structure of the nanopatterns is completely determined by and can be shrunk by millions of times from the moving track of the substrate. Multiple surface nanopatterns of different materials with accurately tailorable relative positions can be simply stacked together by moving the substrate by macroscopic distances during different DAN processes. In combination with sophisticated lithographic methods, the DAN method is anticipated to enable substantial advances in nanofabrication.
纳米图案对于各种纳米器件领域的应用至关重要。现有的纳米图案化技术主要通过各种光刻方法直接制造纳米图案，这些方法通常费力、耗时且需要昂贵的设备。在此，展示了一种极其简单的纳米级绘图（DAN）概念，即通过控制基底的宏观运动来间接制造合理的纳米图案。纳米图案的结构完全由基底的移动轨迹决定，并且可以从该移动轨迹缩小数百万倍。通过在不同的DAN过程中使基底进行宏观距离的移动，具有精确可定制相对位置的多种不同材料的表面纳米图案可以简单地堆叠在一起。与先进的光刻方法相结合，预计DAN方法将在纳米制造方面取得重大进展。
