用于液相透射电子显微镜的电化学芯片的设计与制作。
Design and fabrication of an electrochemical chip for liquid-phase transmission electron microscopy.
机构信息
Nanostructures Research Laboratory, Japan Fine Ceramics Center, 2-4-1 Mutsuno, Atsuta-ku, Nagoya 456-8587, Japan.
Department of Electrical Engineering and Information Systems, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan.
出版信息
Microscopy (Oxf). 2022 Aug 1;71(4):238-241. doi: 10.1093/jmicro/dfac023.
Liquid-phase transmission electron microscopy (LP-TEM) can be used with an electrochemical chip (e-chip) to observe electrochemical reactions in a liquid in situ. The design of electrodes on an e-chip fabricated using microelectromechanical system technology cannot be easily changed. Here, we report a newly designed e-chip and its fabrication process. Electrodes with a desired shape were fabricated with various metals via an additional step of vacuum deposition onto our e-chip with a shadow mask. For precise control of the electrochemical reactions in LP-TEM, optimization of the electrode shape and material is critical.
液相透射电子显微镜（LP-TEM）可以与电化学芯片（e-chip）一起使用，以原位观察液体中的电化学反应。使用微机电系统技术制造的 e-chip 上的电极设计不易改变。在这里，我们报告了一种新设计的 e-chip 及其制造工艺。通过在带有阴影掩模的 e-chip 上进行真空沉积的附加步骤，使用各种金属制造出具有所需形状的电极。为了在 LP-TEM 中精确控制电化学反应，优化电极形状和材料至关重要。
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