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基于裂纹光刻的微纳流体平台制备用于灵敏宽带光电探测器的异质半导体纳米线阵列

Heterogeneous semiconductor nanowire array for sensitive broadband photodetector by crack photolithography-based micro-/nanofluidic platforms.

作者信息

Zhou Qitao, Park Jun Gyu, Kim Taesung

机构信息

Engineering Research Center of Nano-Geomaterials of the Ministry of Education, Faculty of Materials Science and Chemistry, China University of Geosciences Wuhan 430074 China.

Department of Mechanical Engineering, Ulsan National Institute of Science and Technology (UNIST) 50 UNIST-gil Ulsan 44919 Republic of Korea

出版信息

RSC Adv. 2020 Jun 22;10(40):23712-23719. doi: 10.1039/d0ra03784b. eCollection 2020 Jun 19.

DOI:10.1039/d0ra03784b
PMID:35517338
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9054822/
Abstract

The growth of nanowires (NWs) into nano-/microelectromechanical systems (NEMS/MEMS) by solution processing is attractive for its relative simplicity and economic value. We present innovative, versatile microfabrication that produces multiple, heterogeneous semiconductor NWs. A crack photolithography-based micro-/nanofluidic platform has been developed. This platform offers the solution growth of NWs while enabling the control of quantity, dimensions, orientation, alignment, position, and material. The generation of grain boundary (GB)-rich CHNHPbI NWs using the micro-/nanofluidic device is exemplary. High-quality single-crystal CHNHPbI NWs were derived by injection of a CHNHPbI solution. We produced a parallel NW array of CHNHPbI NW for visible light detection and ZnO NW for ultraviolet detection, thereby demonstrating an unprecedented broadband composite photodetector. The micro-/nanofluidic fabrication platform enables the production of multiple, heterogeneous semiconductor NW arrays on one substrate, offering the potential to elicit synergistic performance and functional enhancements from various NWs.

摘要

通过溶液处理将纳米线(NWs)生长到纳米/微机电系统(NEMS/MEMS)中,因其相对简单和经济价值而具有吸引力。我们展示了一种创新的、通用的微制造技术,可生产多种异质半导体纳米线。已开发出一种基于裂纹光刻的微/纳流体平台。该平台在实现纳米线溶液生长的同时,还能控制纳米线的数量、尺寸、取向、排列、位置和材料。使用微/纳流体装置生成富含晶界(GB)的CHNHPbI纳米线就是一个范例。通过注入CHNHPbI溶液得到了高质量的单晶CHNHPbI纳米线。我们制备了用于可见光检测的CHNHPbI纳米线平行阵列和用于紫外线检测的ZnO纳米线,从而展示了一种前所未有的宽带复合光电探测器。微/纳流体制造平台能够在一个基板上生产多种异质半导体纳米线阵列,为从各种纳米线中获得协同性能和功能增强提供了潜力。

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Heterogeneous semiconductor nanowire array for sensitive broadband photodetector by crack photolithography-based micro-/nanofluidic platforms.基于裂纹光刻的微纳流体平台制备用于灵敏宽带光电探测器的异质半导体纳米线阵列
RSC Adv. 2020 Jun 22;10(40):23712-23719. doi: 10.1039/d0ra03784b. eCollection 2020 Jun 19.
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本文引用的文献

1
Nanochannel-Assisted Perovskite Nanowires: From Growth Mechanisms to Photodetector Applications.纳米通道辅助的钙钛矿纳米线:从生长机制到光电探测器应用
ACS Nano. 2018 Aug 28;12(8):8406-8414. doi: 10.1021/acsnano.8b03826. Epub 2018 Jul 5.
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High-speed logic integrated circuits with solution-processed self-assembled carbon nanotubes.具备溶液处理自组装碳纳米管的高速逻辑集成电路。
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Direct Conversion of Perovskite Thin Films into Nanowires with Kinetic Control for Flexible Optoelectronic Devices.钙钛矿薄膜的动力学控制直接转化为纳米线,用于柔性光电设备。
Nano Lett. 2016 Feb 10;16(2):871-6. doi: 10.1021/acs.nanolett.5b03504. Epub 2016 Jan 26.
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Aligned Single-Crystalline Perovskite Microwire Arrays for High-Performance Flexible Image Sensors with Long-Term Stability.用于高性能柔性图像传感器的对齐单晶钙钛矿微线阵列及其长期稳定性。
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