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具备溶液处理自组装碳纳米管的高速逻辑集成电路。

High-speed logic integrated circuits with solution-processed self-assembled carbon nanotubes.

作者信息

Han Shu-Jen, Tang Jianshi, Kumar Bharat, Falk Abram, Farmer Damon, Tulevski George, Jenkins Keith, Afzali Ali, Oida Satoshi, Ott John, Hannon James, Haensch Wilfried

机构信息

IBM Thomas J. Watson Research Center, Yorktown Heights, New York 10598, USA.

出版信息

Nat Nanotechnol. 2017 Sep;12(9):861-865. doi: 10.1038/nnano.2017.115. Epub 2017 Jul 3.

DOI:10.1038/nnano.2017.115
PMID:28674460
Abstract

As conventional monolithic silicon technology struggles to meet the requirements for the 7-nm technology node, there has been tremendous progress in demonstrating the scalability of carbon nanotube field-effect transistors down to the size that satisfies the 3-nm node and beyond. However, to date, circuits built with carbon nanotubes have overlooked key aspects of a practical logic technology and have stalled at simple functionality demonstrations. Here, we report high-performance complementary carbon nanotube ring oscillators using fully manufacturable processes, with a stage switching frequency of 2.82 GHz. The circuit was built on solution-processed, self-assembled carbon nanotube arrays with over 99.9% semiconducting purity, and the complementary feature was achieved by employing two different work function electrodes.

摘要

随着传统的单晶硅技术难以满足7纳米技术节点的要求,在证明碳纳米管场效应晶体管缩小到满足3纳米及以下节点尺寸的可扩展性方面已经取得了巨大进展。然而,迄今为止,用碳纳米管构建的电路忽略了实用逻辑技术的关键方面,并且在简单功能演示方面停滞不前。在此,我们报告了使用完全可制造工艺的高性能互补碳纳米管环形振荡器,其级开关频率为2.82吉赫兹。该电路基于溶液处理的自组装碳纳米管阵列构建,半导体纯度超过99.9%,并且通过采用两种不同功函数的电极实现了互补特性。

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