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厚度对喷涂InS薄膜气敏性能的影响。

Thickness effect on VOC sensing properties of sprayed InS films.

作者信息

Souissi R, Bouguila N, Bouricha B, Vázquez-Vázquez C, Bendahan M, Labidi A

机构信息

Tunis University, Ecole Nationale Supérieure d'ingénieurs de Tunis (ENSIT) Tunisia.

Carthage University, Laboratoire des Matériaux, Molécules et Applications IPEST BP 51, La Marsa 2070 Tunis Tunisia.

出版信息

RSC Adv. 2020 May 18;10(32):18841-18852. doi: 10.1039/d0ra01573c. eCollection 2020 May 14.

Abstract

This work reports the thickness effect on the sensing performances of InS material for some Volatile Organic Compounds (VOCs). InS films were deposited on glass substrates by the spray pyrolysis technique. Different samples were prepared changing the spray time in the range of 10-90 min. The film thickness varies from 0.8 μm to 6.1 μm. The X-ray diffraction results demonstrate that the InS films are polycrystalline in nature and exhibit a cubic structure. Additionally, Scanning Electron Microscopy (SEM) and 3D profilometry examinations show that the surface roughness increases with the rising spray time. On the other hand, the oxygen adsorption working temperature was investigated. Sensing measurements with ethanol, methanol and acetone gases were carried out by a dynamic control of the current passing through the sensitive layers. The best sensitivity was obtained for the film matching a 70 min deposit time. An understanding of the detection mechanism based on the oxidation reaction between reduced vapors and chemisorbed oxygen was confirmed. The selectivity of the sensor was analyzed for several volatile organic compounds (VOCs).

摘要

这项工作报道了InS材料对某些挥发性有机化合物(VOCs)传感性能的厚度效应。通过喷雾热解技术将InS薄膜沉积在玻璃基板上。通过改变喷雾时间在10 - 90分钟范围内制备了不同的样品。薄膜厚度从0.8μm变化到6.1μm。X射线衍射结果表明InS薄膜本质上是多晶的,呈现立方结构。此外,扫描电子显微镜(SEM)和三维轮廓测量检查表明,表面粗糙度随着喷雾时间的增加而增大。另一方面,研究了氧吸附工作温度。通过动态控制通过敏感层的电流,对乙醇、甲醇和丙酮气体进行传感测量。对于沉积时间为70分钟的薄膜获得了最佳灵敏度。证实了基于还原蒸汽与化学吸附氧之间氧化反应的检测机制。分析了传感器对几种挥发性有机化合物(VOCs)的选择性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6ae9/9054027/fa6c8fe8e040/d0ra01573c-f1.jpg

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