静电吸附在柔性器件中的应用：综述

Electrostatic pull-in application in flexible devices: A review.

作者信息

Cai Teng, Fang Yuming, Fang Yingli, Li Ruozhou, Yu Ying, Huang Mingyang

机构信息

College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing, China.

National and Local Joint Engineering Laboratory of RF Integration and Micro-Assembly Technology, Nanjing University of Posts and Telecommunications, Nanjing, China.

出版信息

Beilstein J Nanotechnol. 2022 Apr 12;13:390-403. doi: 10.3762/bjnano.13.32. eCollection 2022.

DOI:10.3762/bjnano.13.32

PMID:35529805

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9039526/

Abstract

The electrostatic pull-in effect is a common phenomenon and a key parameter in the design of microscale and nanoscale devices. Flexible electronic devices based on the pull-in effect have attracted increasing attention due to their unique ductility. This review summarizes nanoelectromechanical switches made by flexible materials and classifies and discusses their applications in, among others, radio frequency systems, microfluidic systems, and electrostatic discharge protection. It is supposed to give researchers a more comprehensive understanding of the pull-in phenomenon and the development of its applications. Also, the review is meant to provide a reference for engineers to design and optimize devices.

摘要

静电吸合效应是一种常见现象，也是微纳尺度器件设计中的关键参数。基于吸合效应的柔性电子器件因其独特的延展性而受到越来越多的关注。本文综述了由柔性材料制成的纳米机电开关，并对其在射频系统、微流控系统和静电放电保护等方面的应用进行了分类和讨论。旨在使研究人员对吸合现象及其应用发展有更全面的了解。此外，本文综述还为工程师设计和优化器件提供参考。