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综述：基于静电驱动纳米梁的纳米机电开关——材料解决方案与工作条件

Review: Electrostatically actuated nanobeam-based nanoelectromechanical switches - materials solutions and operational conditions.

作者信息

Jasulaneca Liga, Kosmaca Jelena, Meija Raimonds, Andzane Jana, Erts Donats

机构信息

Institute of Chemical Physics.

Department of Chemistry, University of Latvia, Raina Blvd. 19, Riga, LV-1586, Latvia.

出版信息

Beilstein J Nanotechnol. 2018 Jan 25;9:271-300. doi: 10.3762/bjnano.9.29. eCollection 2018.

DOI:10.3762/bjnano.9.29
PMID:29441272
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5789396/
Abstract

This review summarizes relevant research in the field of electrostatically actuated nanobeam-based nanoelectromechanical (NEM) switches. The main switch architectures and structural elements are briefly described and compared. Investigation methods that allow for exploring coupled electromechanical interactions as well as studies of mechanically or electrically induced effects are covered. An examination of the complex nanocontact behaviour during various stages of the switching cycle is provided. The choice of the switching element and the electrode is addressed from the materials perspective, detailing the benefits and drawbacks for each. An overview of experimentally demonstrated NEM switching devices is provided, and together with their operational parameters, the reliability issues and impact of the operating environment are discussed. Finally, the most common NEM switch failure modes and the physical mechanisms behind them are reviewed and solutions proposed.

摘要

本综述总结了基于静电驱动纳米梁的纳米机电（NEM）开关领域的相关研究。简要描述并比较了主要的开关架构和结构元件。涵盖了用于探索机电耦合相互作用以及机械或电诱导效应研究的调查方法。提供了对开关周期各个阶段复杂纳米接触行为的研究。从材料角度探讨了开关元件和电极的选择，详细说明了每种材料的优缺点。提供了实验证明的NEM开关器件的概述，并结合其操作参数，讨论了可靠性问题和操作环境的影响。最后，回顾了最常见的NEM开关故障模式及其背后的物理机制，并提出了解决方案。

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