Cao Wen, Deng Cai Song, Pan Ting Ting, Hao Hui, Wang Ming
School of Physics and Technology, Nanjing Normal University, Jiangsu, Key Laboratory on Opto-Electronic Technology Nanjing 210023 China
RSC Adv. 2019 Jul 31;9(41):23774-23779. doi: 10.1039/c9ra03483h. eCollection 2019 Jul 29.
A two-dimensional periodic metallic spherical shell array structure with controllable geometric parameters was fabricated on the target substrate by microsphere templating and magnetron sputtering. The micro-flow injection method was used to prepare a two-dimensional colloidal microsphere template, and reactive ion etching (RIE) was used to change the spherical spacing. The geometric parameters and spectral characteristics of the spherical shell array structure were analyzed with the simulation software FDTD solutions. The nanostructural morphology and optical properties of the samples were characterized by scanning electron microscopy (SEM) and optical spectral analysis (OSA). The refractive index sensing application based on the principle of the local surface plasmon resonance (LSPR) and plasmonic interference was realized. The results show that the spherical shell arrays structure is sensitive to the surrounding environment, the refractive index sensitivity of spherical shell array structure is 527.07 nm per RIU and 922.25 nm per RIU, and the quality factor FOM is 16.5 and 15.3, respectively. The techniques demonstrated can produce large-area periodic nanostructure arrays with ultra-large production in cost-competitive ways. In addition, these properties make them applicable to multiple applications, such as surface plasmon sensors and various optical device.
通过微球模板法和磁控溅射在目标衬底上制备了一种几何参数可控的二维周期性金属球壳阵列结构。采用微流控注射法制备二维胶体微球模板，并利用反应离子刻蚀（RIE）改变球间距。利用模拟软件FDTD solutions分析了球壳阵列结构的几何参数和光谱特性。通过扫描电子显微镜（SEM）和光谱分析（OSA）对样品的纳米结构形态和光学性质进行了表征。基于局域表面等离子体共振（LSPR）原理和等离子体干涉实现了折射率传感应用。结果表明，球壳阵列结构对周围环境敏感，球壳阵列结构的折射率灵敏度分别为每RIU 527.07 nm和每RIU 922.25 nm，品质因数FOM分别为16.5和15.3。所展示的技术能够以具有成本竞争力的方式大规模生产大面积周期性纳米结构阵列。此外，这些特性使其适用于多种应用，如表面等离子体传感器和各种光学器件。
