基于薄氧化铝纳米多孔膜和 SnBiMoO 纳米复合材料的微功耗化学电阻传感器。

A Micropowered Chemoresistive Sensor Based on a Thin Alumina Nanoporous Membrane and SnBiMoO Nanocomposite.

机构信息

R&D Laboratory of Nanotechnologies, Belarusian State University of Informatics and Radioelectronics, 220013 Minsk, Belarus.

Instrumentation Engineering Faculty, Micro- and Nanotechnology Department, Belarusian National Technical University, 220013 Minsk, Belarus.

出版信息

Sensors (Basel). 2022 May 10;22(10):3640. doi: 10.3390/s22103640.

DOI:10.3390/s22103640

PMID:35632047

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9147226/

Abstract

This work presents and discusses the design of an efficient gas sensor, as well as the technological process of its fabrication. The optimal dimensions of the different sensor elements including their deformation were determined considering the geometric modeling and the calculated moduli of the elasticity and thermal conductivity coefficients. Multicomponent SnBiMoO thin films were prepared by ionic layering on an anodic alumina membrane and were used as gas-sensitive layers in the sensor design. The resistance of the SnBiMoO nanostructured film at temperatures up to 150 °C exceeded 10 Ohm but decreased to 10 Ohm at 550 °C in air. The sensitivity of the SnBiMoO composite to concentrations of 5 and 40 ppm H at 250 °C (10 mW) was determined to be 0.22 and 0.40, respectively.

摘要

本工作提出并讨论了一种高效气体传感器的设计以及其制造工艺。在考虑几何建模和计算弹性模量和热导率系数的基础上，确定了不同传感器元件的最佳尺寸及其变形。通过在阳极氧化铝膜上进行离子层积制备了 SnBiMoO 多组分薄膜，并将其用作传感器设计中的气敏层。在高达 150°C 的温度下，SnBiMoO 纳米结构薄膜的电阻超过 10 欧姆，但在空气中降至 550°C 时降至 10 欧姆。在 250°C（10 mW）下，SnBiMoO 复合材料对 5 和 40 ppm H 的浓度的灵敏度分别为 0.22 和 0.40。