Holder Daniel, Weber Rudolf, Graf Thomas
Institut für Strahlwerkzeuge (IFSW), University of Stuttgart, Pfaffenwaldring 43, 70569 Stuttgart, Germany.
Micromachines (Basel). 2022 May 31;13(6):870. doi: 10.3390/mi13060870.
An analytical model is presented that allows predicting the progress and the final depth obtained by laser micromachining of grooves in metals with ultrashort laser pulses. The model assumes that micromachined grooves feature a V-shaped geometry and that the fluence absorbed along the walls is distributed with a linear increase from the edge to the tip of the groove. The depth progress of the processed groove is recursively calculated based on the depth increments induced by successive scans of the laser beam along the groove. The experimental validation confirms the model and its assumptions for micromachining of grooves in a Ti-alloy with femtosecond pulses and different pulse energies, repetition rates, scanning speeds and number of scans.
本文提出了一种分析模型，该模型能够预测用超短激光脉冲对金属进行激光微加工时凹槽的加工进度和最终深度。该模型假定微加工凹槽具有V形几何形状，并且沿凹槽壁吸收的能量密度从凹槽边缘到尖端呈线性增加分布。基于激光束沿凹槽连续扫描所引起的深度增量，递归计算加工凹槽的深度进展。实验验证证实了该模型及其关于用飞秒脉冲以及不同脉冲能量、重复频率、扫描速度和扫描次数对钛合金进行凹槽微加工的假设。
