Department of Physics, Engineering Physics and Astronomy, Queen's University, Kingston, Canada K7L 3N6.
Opt Lett. 2010 Mar 1;35(5):646-8. doi: 10.1364/OL.35.000646.
We observe sample morphology changes in real time (24 kHz) during and between percussion drilling pulses by integrating a low-coherence microscope into a laser micromachining platform. Nonuniform cut speed and sidewall evolution in stainless steel are observed to strongly depend on assist gas. Interpulse morphology relaxation such as hole refill is directly imaged, showing dramatic differences in the material removal process dependent on pulse duration/peak power (micros/0.1 kW, ps/20 MW) and material (steel, lead zirconate titanate PZT). Blind hole depth precision is improved by over 1 order of magnitude using in situ feedback from the imaging system.
我们通过将低相干显微镜集成到激光微加工平台中，实时（24 kHz）观察到在敲击钻脉冲期间和之间的样品形态变化。观察到不锈钢中的不均匀切割速度和侧壁演化强烈依赖于辅助气体。像孔填充这样的脉冲间形态松弛直接成像，显示出与脉冲持续时间/峰值功率（微/0.1 kW，ps/20 MW）和材料（钢、锆钛酸铅 PZT）相关的材料去除过程的显著差异。通过使用成像系统的原位反馈，盲孔深度精度提高了 1 个数量级以上。
