Moisello Elisabetta, Castagna Maria Eloisa, La Malfa Antonella, Bruno Giuseppe, Malcovati Piero, Bonizzoni Edoardo
Department of Electrical, Computer and Biomedical Engineering, University of Pavia, Via Ferrata 5, 2100 Pavia, Italy.
STMicroelectronics, 95121 Catania, Italy.
Micromachines (Basel). 2022 Jun 11;13(6):934. doi: 10.3390/mi13060934.
This paper presents a detailed analysis of a micromachined thermopile detector featuring high responsivity and a versatile mosaic structure, based on 128 60 µm × 60 µm pixels connected in series and/or in parallel. The mosaic structure is based on the one employed for the thermal sensor known as TMOS, which consists of a CMOS-SOI transistor embedded in a suspended and thermally isolated absorbing membrane, released through microelectro mechanical system (MEMS) post-processing. Two versions of the thermopile detector, featuring different series/parallel connections, are presented and were experimentally characterized. The most performant of the two achieved 2.7 × 104 V/W responsivity. The thermopile sensors' performances are compared to that of the TMOS sensor, adopting different configurations, and their application as proximity detectors was verified through measurements.
本文详细分析了一种具有高响应度和通用镶嵌结构的微机械热电堆探测器，该探测器基于128个60 µm×60 µm的像素串联和/或并联连接。这种镶嵌结构基于用于名为TMOS的热传感器的结构，它由嵌入悬浮且热隔离吸收膜中的CMOS-SOI晶体管组成，通过微机电系统（MEMS）后处理释放出来。本文展示了两种具有不同串联/并联连接方式的热电堆探测器版本，并对其进行了实验表征。两者中性能最佳的实现了2.7×104 V/W的响应度。将热电堆传感器的性能与采用不同配置的TMOS传感器的性能进行了比较，并通过测量验证了它们作为接近探测器的应用。
