Zhou Na, Ding Xuefeng, Li Hongbo, Ni Yue, Pu Yonglong, Mao Haiyang
Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China.
University of Chinese Academy of Sciences (UCAS), Beijing 100029, China.
Micromachines (Basel). 2021 Dec 13;12(12):1554. doi: 10.3390/mi12121554.
A thermopile detector with their thermocouples distributed in micro-bridges is designed and investigated in this work. The thermopile detector consists of 16 pairs of n-poly-Si/p-poly-Si thermocouples, which are fabricated using a low-cost, high-throughput CMOS process. The micro-bridges are realized by forming micro trenches at the front side first and then releasing the silicon substrate at the back side. Compared with a thermopile device using a continuous membrane, the micro-bridge-based one can achieve an improvement of the output voltage by 13.8% due to a higher temperature difference between the hot and cold junctions as there is a decrease in thermal conduction loss in the partially hollowed structure. This technique provides an effective way for developing high-performance thermopile detectors and other thermal devices.
本文设计并研究了一种热电偶分布在微桥中的热电堆探测器。该热电堆探测器由16对n型多晶硅/p型多晶硅热电偶组成，采用低成本、高通量的CMOS工艺制造。微桥是通过先在前侧形成微沟槽，然后在背面释放硅衬底来实现的。与使用连续薄膜的热电堆器件相比，基于微桥的热电堆器件由于热冷结之间的温差更大，在部分中空结构中热传导损耗降低，输出电压可提高13.8%。该技术为开发高性能热电堆探测器和其他热器件提供了一种有效途径。
