Hans Sukriti, Parida Basanta Kumar, Pachchigar Vivek, Augustine Sebin, Kp Sooraj, Ranjan Mukesh
Institute for Plasma Research, Gandhinagar 382428, India.
Homi Bhabha National Institute, 2nd floor, BARC Training School Complex, Anushaktinagar, Mumbai 400094, Maharashtra, India.
Nanotechnology. 2022 Jul 14;33(40). doi: 10.1088/1361-6528/ac7cf4.
Ion beam sputtering, known as potential technique for producing nanoripple on various surfaces having wide range of applications. Along with nanoripple, triangular features are also superimposed, limiting their use for some potential applications. Here we are reporting evolution of triangular features on Ge (100) surfaces under low energy (300-1000 eV) Xe ion irradiation at room temperature for angles of incidence (61°-80°) and ion fluences of (5.34 × 10-8.01 × 10ions cm). Triangular features appear with the onset of ripple formation and disappear when the ripple periodicity is lost. These features formation depend not only on material but also depend on the ratio of the ion/target mass. In comparison with numerical simulations based on modified anisotropic Kuramoto-Sivanshinsky equation, we find good agreement for the evolution of base angle and lateral length for the triangular features with ion incidence angle. The dynamics of triangular feature with ion incidence angle and ion fluence have been reported. Ion-incidence angle dependency is adequately replicated in numerical simulations. Experimentally the base angle and lateral length increases with increase in ion incidence angle, similar trend is observed in numerical simulation.
离子束溅射是一种在各种表面上产生纳米波纹的潜在技术，具有广泛的应用。除了纳米波纹外，还叠加有三角形特征，这限制了它们在某些潜在应用中的使用。在此，我们报告了在室温下，低能量（300 - 1000 eV）Xe离子以入射角（61° - 80°）和离子通量（5.34×10 - 8.01×10离子/cm²）辐照Ge（100）表面时三角形特征的演变情况。三角形特征随着波纹形成的开始而出现，并在波纹周期性消失时消失。这些特征的形成不仅取决于材料，还取决于离子/靶材质量比。与基于修正各向异性Kuramoto - Sivanshinsky方程的数值模拟相比，我们发现三角形特征的底角和横向长度随离子入射角的演变具有良好的一致性。已经报道了三角形特征随离子入射角和离子通量的动力学情况。离子入射角依赖性在数值模拟中得到了充分再现。实验上，底角和横向长度随着离子入射角的增加而增加，在数值模拟中也观察到了类似趋势。
