Cucciniello Nicholas, Lee Derek, Feng Henry Y, Yang Zihao, Zeng Hao, Patibandla Nag, Zhu Mingwei, Jia Quanxi
Department of Materials Design and Innovation, University at Buffalo-The State University of New York, Buffalo, NY 14260, United States of America.
Applied Materials, Inc., Santa Clara, CA 95054, United States of America.
J Phys Condens Matter. 2022 Jul 14;34(37). doi: 10.1088/1361-648X/ac7dd6.
Superconducting niobium nitride (NbN) continues to be investigated decades on, largely in part to its advantageous superconducting properties and wide use in superconducting electronics. Particularly, NbN-based superconducting nanowire single-photon detectors (SNSPDs) have shown exceptional performance and NbN remains as the material of choice in developing future generation quantum devices. In this perspective, we describe the processing-structure-property relationships governing the superconducting properties of NbN films. We further discuss the complex interplay between the material properties, processing parameters, substrate materials, device architectures, and performance of SNSPDs. We also highlight the latest progress in optimizing SNSPD performance parameters.
几十年来，超导氮化铌（NbN）一直在持续研究中，这在很大程度上归因于其优越的超导性能以及在超导电子学中的广泛应用。特别是，基于NbN的超导纳米线单光子探测器（SNSPD）展现出了卓越的性能，并且NbN仍然是开发下一代量子器件的首选材料。从这个角度出发，我们描述了决定NbN薄膜超导性能的加工-结构-性能关系。我们还进一步讨论了材料特性、加工参数、衬底材料、器件架构以及SNSPD性能之间的复杂相互作用。我们还强调了在优化SNSPD性能参数方面的最新进展。
