Photonics Research Group, Ghent University-Imec, Technologiepark-Zwijnaarde 126, 9052 Ghent, Belgium.
Center for Nano- and Biophotonics (NB-Photonics), Ghent University, 9052 Ghent, Belgium.
Sensors (Basel). 2022 Jun 23;22(13):4735. doi: 10.3390/s22134735.
Laser Doppler vibrometry (LDV) is a non-contact vibration measurement technique based on the Doppler effect of the reflected laser beam. Thanks to its feature of high resolution and flexibility, LDV has been used in many different fields today. The miniaturization of the LDV systems is one important development direction for the current LDV systems that can enable many new applications. In this paper, we will review the state-of-the-art method on LDV miniaturization. Systems based on three miniaturization techniques will be discussed: photonic integrated circuit (PIC), self-mixing, and micro-electrochemical systems (MEMS). We will explain the basics of these techniques and summarize the reported miniaturized LDV systems. The advantages and disadvantages of these techniques will also be compared and discussed.
激光多普勒振动测量（LDV）是一种基于激光反射光束多普勒效应的非接触式振动测量技术。由于其具有高分辨率和灵活性的特点，LDV 已经在许多不同的领域得到了应用。LDV 系统的小型化是当前 LDV 系统的一个重要发展方向，可以实现许多新的应用。在本文中，我们将回顾 LDV 小型化的最新方法。将讨论基于三种小型化技术的系统：光子集成电路（PIC）、自混合和微机电系统（MEMS）。我们将解释这些技术的基本原理，并总结报道的小型化 LDV 系统。还将对这些技术的优缺点进行比较和讨论。
