Liu Bowen, Liang Tian, Qi Wenjie, Zhong Anxiang, Chen Mingwei, Lu Yulan, Chen Jian, Chen Deyong, Wang Junbo
The State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, 100190 Beijing, China.
The School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, 100049 Beijing, China.
Microsyst Nanoeng. 2022 Jul 12;8:80. doi: 10.1038/s41378-022-00411-0. eCollection 2022.
A new electrochemical angular microaccelerometer with integrated sensitive electrodes perpendicular to flow channels was developed in this paper. Based on a liquid inertial mass, an incoming angular acceleration was translated into varied concentrations of reactive ions around sensitive microelectrodes, generating a detection current. Key structural parameters of the sensitive microelectrodes were designed and compared based on theoretical analysis and numerical simulations. An angular microaccelerometer incorporating sensitive microelectrodes was then fabricated, assembled and characterized, producing a sensitivity of 338 V/(rad/s), a -3 dB bandwidth of 0.01-10 Hz and a noise level of 4.67 × 10 (rad/s)/Hz @ 1 Hz. These performances were better than their commercial counterparts based on traditional electrodes and previously reported microaccelerometers based on microsensitive electrodes in parallel with flow channels, which can be applied to measure rotational accelerations in earthquakes and buildings.
本文开发了一种新型的电化学角微加速度计，其集成的敏感电极垂直于流动通道。基于液体惯性质量，输入的角加速度被转换为敏感微电极周围反应性离子浓度的变化，从而产生检测电流。基于理论分析和数值模拟，设计并比较了敏感微电极的关键结构参数。然后制造、组装并表征了一种包含敏感微电极的角微加速度计，其灵敏度为338 V/(rad/s)，-3 dB带宽为0.01 - 10 Hz，在1 Hz时的噪声水平为4.67×10(rad/s)/Hz。这些性能优于基于传统电极的同类商用产品以及先前报道的基于与流动通道平行的微敏感电极的微加速度计，可应用于测量地震和建筑物中的旋转加速度。
