Hsu Chung-Yu, Yiu Gow-Zin, Chang You-Chia
Department of Photonics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan.
Micromachines (Basel). 2022 Jun 24;13(7):990. doi: 10.3390/mi13070990.
Silicon photonics has recently expanded its applications to delivering free-space emissions for detecting or manipulating external objects. The most notable example is the silicon optical phased array, which can steer a free-space beam to achieve a chip-scale solid-state LiDAR. Other examples include free-space optical communication, quantum photonics, imaging systems, and optogenetic probes. In contrast to the conventional optical system consisting of bulk optics, silicon photonics miniaturizes an optical system into a photonic chip with many functional waveguiding components. By leveraging the mature and monolithic CMOS process, silicon photonics enables high-volume production, scalability, reconfigurability, and parallelism. In this paper, we review the recent advances in beam steering technologies based on silicon photonics, including optical phased arrays, focal plane arrays, and dispersive grating diffraction. Various beam-shaping technologies for generating collimated, focused, Bessel, and vortex beams are also discussed. We conclude with an outlook of the promises and challenges for the free-space applications of silicon photonics.
硅光子学最近已将其应用扩展到提供自由空间发射,用于检测或操纵外部物体。最显著的例子是硅光学相控阵,它可以操纵自由空间光束以实现芯片级固态激光雷达。其他例子包括自由空间光通信、量子光子学、成像系统和光遗传学探针。与由体光学器件组成的传统光学系统不同,硅光子学将光学系统小型化为具有许多功能波导组件的光子芯片。通过利用成熟的单片互补金属氧化物半导体工艺,硅光子学能够实现大批量生产、可扩展性、可重构性和并行性。在本文中,我们回顾了基于硅光子学的光束控制技术的最新进展,包括光学相控阵、焦平面阵列和色散光栅衍射。还讨论了用于产生准直光束、聚焦光束、贝塞尔光束和涡旋光束的各种光束整形技术。我们最后展望了硅光子学在自由空间应用中的前景和挑战。