Yong Zheng, Chen Hong, Luo Xianshu, Govdeli Alperen, Chua Hongyao, Azadeh Saeed S, Stalmashonak Andrei, Lo Guo-Qiang, Poon Joyce K S, Sacher Wesley D
Opt Express. 2022 Feb 28;30(5):7225-7237. doi: 10.1364/OE.448614.
We demonstrate power-efficient, thermo-optic, silicon nitride waveguide phase shifters for blue, green, and yellow wavelengths. The phase shifters operated with low power consumption due to a suspended structure and multi-pass waveguide design. The devices were fabricated on 200-mm silicon wafers using deep ultraviolet lithography as part of an active visible-light integrated photonics platform. The measured power consumption to achieve a π phase shift (averaged over multiple devices) was 0.78, 0.93, 1.09, and 1.20 mW at wavelengths of 445, 488, 532, and 561 nm, respectively. The phase shifters were integrated into Mach-Zehnder interferometer switches, and 10 - 90% rise(fall) times of about 570(590) μs were measured.
我们展示了用于蓝色、绿色和黄色波长的高效节能热光氮化硅波导移相器。由于采用了悬浮结构和多通道波导设计，这些移相器以低功耗运行。这些器件是在200毫米硅片上使用深紫外光刻技术制造的，作为有源可见光集成光子平台的一部分。在波长为445、488、532和561纳米时，实现π相移（在多个器件上平均）的测量功耗分别为0.78、0.93、1.09和1.20毫瓦。这些移相器被集成到马赫-曾德尔干涉仪开关中，测量到的10%-90%上升（下降）时间约为570（590）微秒。
