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具有平行对称四电极配置的直读式微机电系统电导率传感器。

A Direct-Reading MEMS Conductivity Sensor with a Parallel-Symmetric Four-Electrode Configuration.

作者信息

Liao Zhiwei, Jing Junmin, Gao Rui, Guo Yuzhen, Yao Bin, Zhang Huiyu, Zhao Zhou, Zhang Wenjun, Wang Yonghua, Zhang Zengxing, Xue Chenyang

机构信息

State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.

School of Aerospace Engineering, Xiamen University, Xiamen 361102, China.

出版信息

Micromachines (Basel). 2022 Jul 21;13(7):1153. doi: 10.3390/mi13071153.

DOI:10.3390/mi13071153
PMID:35888969
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9319071/
Abstract

This work proposes a design for a direct-reading conductivity sensor with a parallel symmetrical four-electrode structure, which integrates a silicon-based platinum thin-film strip electrode and a serpentine temperature compensation electrode. The optimal structural parameters of the electrode were determined by finite element simulations performed via COMSOL Multiphysics. Next, the designed conductivity sensor chip was fabricated using MEMS technology, and subsequently, the conductivity measurement circuit was designed to test the fabricated sensor's performance. In laboratory tests, the optimal AC excitation frequency was observed to be 1.067 kHz, while the maximum measurement range was 0-107.41 mS/cm and the measurement precision in low concentration range (0-76.422 mS/cm) was ±0.1 mS/cm. Furthermore, the maximum measurement error of the sensor evaluated using the National Center of Ocean Standards and Metrology was ±0.073 mS/cm. The designed sensor possesses the characteristics of high accuracy, high range, and miniaturization, and enables real-time reading of conductivity value and temperature compensation, which is of great significance for the on-site observation of the physical parameters of marine environment.

摘要

这项工作提出了一种具有平行对称四电极结构的直读式电导率传感器的设计方案，该传感器集成了硅基铂薄膜带状电极和蛇形温度补偿电极。电极的最佳结构参数通过COMSOL Multiphysics进行的有限元模拟确定。接下来，采用微机电系统（MEMS）技术制造了设计好的电导率传感器芯片，随后设计了电导率测量电路来测试所制造传感器的性能。在实验室测试中，观察到最佳交流激励频率为1.067 kHz，最大测量范围为0 - 107.41 mS/cm，低浓度范围（0 - 76.422 mS/cm）的测量精度为±0.1 mS/cm。此外，使用国家海洋标准计量中心评估的传感器最大测量误差为±0.073 mS/cm。所设计的传感器具有高精度、高量程和小型化的特点，能够实时读取电导率值并进行温度补偿，这对于海洋环境物理参数的现场观测具有重要意义。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/8ce36fad45ab/micromachines-13-01153-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/5ba7a3a35e05/micromachines-13-01153-g001.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/99a95c14bfff/micromachines-13-01153-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/e4ae298f6c12/micromachines-13-01153-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/cf2b0660b808/micromachines-13-01153-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/23ef1299bc27/micromachines-13-01153-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/bed0028ce6e8/micromachines-13-01153-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/1ced4e1aa6a3/micromachines-13-01153-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/0c8e23d7681b/micromachines-13-01153-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/12595d5a5692/micromachines-13-01153-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/8ce36fad45ab/micromachines-13-01153-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/5ba7a3a35e05/micromachines-13-01153-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/d937ad21905c/micromachines-13-01153-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/64765772bbea/micromachines-13-01153-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/808c9c953513/micromachines-13-01153-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/e6103b1afa2f/micromachines-13-01153-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/99a95c14bfff/micromachines-13-01153-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/e4ae298f6c12/micromachines-13-01153-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/cf2b0660b808/micromachines-13-01153-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/23ef1299bc27/micromachines-13-01153-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/bed0028ce6e8/micromachines-13-01153-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/1ced4e1aa6a3/micromachines-13-01153-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/0c8e23d7681b/micromachines-13-01153-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/12595d5a5692/micromachines-13-01153-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/22ce/9319071/8ce36fad45ab/micromachines-13-01153-g014.jpg

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