Jiang Haifeng, Tang Longfei
Haifeng Jiang and Longfei Tang Are with Institute of Automation, NanJing University of Science and Technology, Nanjing 210094, China.
ACS Omega. 2021 Nov 23;6(48):32917-32924. doi: 10.1021/acsomega.1c04957. eCollection 2021 Dec 7.
Uniformization of mass sensitivity distribution is conducive to the application of the quartz crystal microbalance (QCM) in some fields. However, the sensitivity of the QCM sensor surface perpendicular to the displacement direction is higher that of the displacement direction in the mass sensitivity distribution of ring and double-ring QCMs, which leads to poor reproducibility of the sensor. Considering the effect of the electrode structure on the mass sensitivity distribution, we found that for ring- and double-ring-type QCMs, when the elliptical single ring and double-ring electrode structures are combined, an approximately uniform mass sensitivity can be obtained in all directions. Therefore, this study proposes the elliptical single-ring and elliptical double-ring electrode structure design. Through theoretical calculations and three-dimensional finite element analysis verification, a systematic investigation is carried out to quantify the effect of the ratio of the minor axis to the major axis of the elliptical electrode on the mass sensitivity distribution in different directions, and the optimal ratio is found to be 0.8. Comparing the mass sensitivity of the new type of electrodes and the original electrodes, the result shows that the mass sensitivity distribution of the elliptical double-ring electrode structure is more uniform. Hence, these specially designed electrodes are conducive to improving the repeatability.
质量灵敏度分布的均匀化有利于石英晶体微天平（QCM）在某些领域的应用。然而，在环形和双环形QCM的质量灵敏度分布中，垂直于位移方向的QCM传感器表面的灵敏度高于位移方向的灵敏度，这导致传感器的重现性较差。考虑到电极结构对质量灵敏度分布的影响，我们发现对于环形和双环形QCM，当椭圆形单环和双环电极结构相结合时，可以在所有方向上获得近似均匀的质量灵敏度。因此，本研究提出了椭圆形单环和椭圆形双环电极结构设计。通过理论计算和三维有限元分析验证，系统地研究了椭圆电极短轴与长轴之比对不同方向质量灵敏度分布的影响，发现最佳比例为0.8。比较新型电极和原始电极的质量灵敏度，结果表明椭圆形双环电极结构的质量灵敏度分布更均匀。因此，这些特殊设计的电极有利于提高重复性。
