Lv Lu, Shuai Yao, Huang Shitian, Zhu Dailei, Wang Yuedong, Luo Wenbo, Wu Chuangui, Zhang Wanli
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, China.
ACS Omega. 2022 Jun 6;7(24):20994-20999. doi: 10.1021/acsomega.2c01749. eCollection 2022 Jun 21.
In the present work, a lithium niobate (LN) 43°Y cut LN film is transferred onto a substrate with 11 layers of SiO/TaO and solidly mounted resonators with a reflector are successfully fabricated with the multilayer structure. The design method and fabrication process are demonstrated. The finite element model and the Mason model are used. Scanning electron microscopy and atomic force microscopy are used to characterize film quality. An optimized design of a Bragg reflector to suppress the leakage of acoustic energy by thickness shear mode is proven to be effective. The influence of the reflector on parasitic modes and filter out-of-band suppression is analyzed. The resonator for 3.5 GHz shows an effective electromechanical coupling coefficient of 17.9%, and the figure of merit is 40.4, which is suitable for band pass filter on the N78 band with high rejection.
在本工作中，将一块铌酸锂（LN）43°Y切割的LN薄膜转移到具有11层SiO/TaO的衬底上，并成功制造出具有反射器的多层结构固态安装谐振器。展示了设计方法和制造工艺。使用了有限元模型和梅森模型。利用扫描电子显微镜和原子力显微镜来表征薄膜质量。事实证明，一种通过厚度剪切模式抑制声能泄漏的布拉格反射器的优化设计是有效的。分析了反射器对寄生模式和滤波器带外抑制的影响。用于3.5 GHz的谐振器显示出17.9%的有效机电耦合系数，品质因数为40.4，适用于具有高抑制能力的N78频段带通滤波器。
