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具有界面六方氮化硼薄膜的垂直氧化镓肖特基结的特性

Characteristics of Vertical GaO Schottky Junctions with the Interfacial Hexagonal Boron Nitride Film.

作者信息

Rama Venkata Krishna Rao, Ranade Ajinkya K, Desai Pradeep, Todankar Bhagyashri, Kalita Golap, Suzuki Hiroo, Tanemura Masaki, Hayashi Yasuhiko

机构信息

Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushima-naka, Kita, Okayama 700-8530 Japan.

Department of Physical Science and Engineering, Nagoya Institute of Technology, Gokiso-Cho, Showa-Ku, Nagoya 466-8555, Japan.

出版信息

ACS Omega. 2022 Jul 22;7(30):26021-26028. doi: 10.1021/acsomega.2c00506. eCollection 2022 Aug 2.

Abstract

We present the device properties of a nickel (Ni)-gallium oxide (GaO) Schottky junction with an interfacial hexagonal boron nitride (hBN) layer. A vertical Schottky junction with the configuration Ni/hBN/GaO/In was created using a chemical vapor-deposited hBN film on a GaO substrate. The current-voltage characteristics of the Schottky junction were investigated with and without the hBN interfacial layer. We observed that the turn-on voltage for the forward current of the Schottky junction was significantly enhanced with the hBN interfacial film. Furthermore, the Schottky junction was analyzed under the illumination of deep ultraviolet light (254 nm), obtaining a photoresponsivity of 95.11 mA/W under an applied bias voltage (-7.2 V). The hBN interfacial layer for the GaO-based Schottky junction can serve as a barrier layer to control the turn-on voltage and optimize the device properties for deep-UV photosensor applications. Furthermore, the demonstrated vertical heterojunction with an hBN layer has the potential to be significant for temperature management at the junction interface to develop reliable GaO-based Schottky junction devices.

摘要

我们展示了一种带有界面六方氮化硼(hBN)层的镍(Ni)-氧化镓(GaO)肖特基结的器件特性。通过在GaO衬底上化学气相沉积hBN薄膜,制备了具有Ni/hBN/GaO/In结构的垂直肖特基结。研究了有无hBN界面层时肖特基结的电流-电压特性。我们观察到,肖特基结正向电流的开启电压因hBN界面薄膜而显著提高。此外,在深紫外光(254 nm)照射下对肖特基结进行了分析,在施加偏置电压(-7.2 V)时获得了95.11 mA/W的光响应度。用于基于GaO的肖特基结的hBN界面层可作为阻挡层来控制开启电压,并优化用于深紫外光电传感器应用的器件特性。此外,所展示的带有hBN层的垂直异质结对于在结界面进行温度管理以开发可靠的基于GaO的肖特基结器件具有重要意义。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/761c/9352259/32d61c8aae77/ao2c00506_0002.jpg

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