Industrial & Personal Safety Intelligence Research Section, Electronics and Telecommunications Research Institute (ETRI), Daejeon 34129, Korea.
Sensors (Basel). 2022 Jul 29;22(15):5672. doi: 10.3390/s22155672.
This paper proposes a simple, high-efficiency refractive index (RI) sensor, with a structure based on the planar lightwave circuit (PLC) probe type. The optical sensor has a 1 × 2 splitter structure with reference and sensing channels, each consisting of a U-shaped waveguide structure that is configured by connecting C bends. This design allows for the sensor device to have a probe structure wherein the surface interconnected with activity devices (i.e., an optical source and optical detector) is placed on one side. The reference channel is bent with a minimum optical loss, and the sensing channel has a bent structure, involving a C-bend waveguide with a maximum loss. The C-bend waveguide with a maximum loss is conformally aligned to have a trench structure with the same bending radius, designed to selectively expose the sidewall of the core layer. The local index contrast varies depending on the material in contact with the trench, resulting in a change in the optical output power of the waveguide. The sensitivity of the proposed sensor was 0 and 2070 μW/refractive index unit (RIU) for the reference and sensing channels, respectively, as the RI changed from 1.385 to 1.445 at a 1550 nm wavelength. These results suggest that the proposed structure enables efficient RI measurement through the use of a simple dip-type method.
本文提出了一种基于平面光波导(PLC)探头型的简单、高效折射率(RI)传感器。该光学传感器具有 1×2 分束结构,具有参考和传感通道,每个通道都由 U 型波导结构组成,通过连接 C 型弯曲来构成。这种设计使得传感器设备具有探针结构,其中与有源器件(即光源和光探测器)表面相互连接的一侧。参考通道的弯曲具有最小的光损耗,而传感通道具有弯曲结构,包括具有最大损耗的 C 型弯曲波导。具有最大损耗的 C 型弯曲波导被共形对准,具有相同弯曲半径的沟槽结构,旨在选择性地暴露芯层的侧壁。局部折射率对比度取决于与沟槽接触的材料,从而导致波导的光输出功率发生变化。在 1550nm 波长下,RI 从 1.385 变化到 1.445 时,参考通道和传感通道的传感器灵敏度分别为 0 和 2070 μW/RIU。这些结果表明,所提出的结构通过使用简单的浸入式方法实现了高效的 RI 测量。