Ma Jiaju, Zhang Dexue, Robledo Dakota, Anzagira Leo, Masoodian Saleh
Gigajot Technology, Inc., Pasadena, CA, USA.
Sci Rep. 2022 Aug 16;12(1):13869. doi: 10.1038/s41598-022-17952-z.
Superior low-light and high dynamic range (HDR) imaging performance with ultra-high pixel resolution are widely sought after in the imaging world. The quanta image sensor (QIS) concept was proposed in 2005 as the next paradigm in solid-state image sensors after charge coupled devices (CCD) and complementary metal oxide semiconductor (CMOS) active pixel sensors. This next-generation image sensor would contain hundreds of millions to billions of small pixels with photon-number-resolving and HDR capabilities, providing superior imaging performance over CCD and conventional CMOS sensors. In this article, we present a 163 megapixel QIS that enables both reliable photon-number-resolving and high dynamic range imaging in a single device. This is the highest pixel resolution ever reported among low-noise image sensors with photon-number-resolving capability. This QIS was fabricated with a standard, state-of-the-art CMOS process with 2-layer wafer stacking and backside illumination. Reliable photon-number-resolving is demonstrated with an average read noise of 0.35 e- rms at room temperature operation, enabling industry leading low-light imaging performance. Additionally, a dynamic range of 95 dB is realized due to the extremely low noise floor and an extended full-well capacity of 20k e-. The design, operating principles, experimental results, and imaging performance of this QIS device are discussed.
在成像领域，具有超高像素分辨率的卓越低光和高动态范围（HDR）成像性能备受广泛追捧。量子图像传感器（QIS）概念于2005年被提出，作为继电荷耦合器件（CCD）和互补金属氧化物半导体（CMOS）有源像素传感器之后固态图像传感器的下一个范例。这种下一代图像传感器将包含数亿到数十亿个具有光子数分辨和HDR能力的小像素，提供优于CCD和传统CMOS传感器的成像性能。在本文中，我们展示了一款16300万像素的QIS，它能在单个器件中实现可靠的光子数分辨和高动态范围成像。这是在具有光子数分辨能力的低噪声图像传感器中所报道的最高像素分辨率。这款QIS采用标准的、先进的CMOS工艺制造，具有两层晶圆堆叠和背照式照明。在室温操作下，平均读出噪声为0.35 e- rms，证明了可靠的光子数分辨能力，实现了业界领先的低光成像性能。此外，由于极低的本底噪声和20k e-的扩展满阱容量，实现了95 dB的动态范围。本文讨论了这款QIS器件的设计、工作原理、实验结果和成像性能。
