Khaidarov Egor, Eschimese Damien, Lai Keng Heng, Huang Aihong, Fu Yuan Hsing, Lin Qunying, Paniagua-Dominguez Ramon, Kuznetsov Arseniy I
Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-03, Innovis, Singapore, 138634, Singapore.
Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis, Singapore, 138634, Singapore.
Sci Rep. 2022 Aug 18;12(1):14044. doi: 10.1038/s41598-022-18259-9.
Nanostructures exhibiting optical resonances (so-called nanoantennas) have strong potential for applications in color printing and filtering with sub-wavelength resolution. While small scale demonstrations of these systems are interesting as a proof-of-concept, their large scale and volume fabrication requires deeper analysis and further development for industrial adoption. Here, we evaluate the color quality produced by large size nanoantenna arrays fabricated on a 12-in. wafer using deep UV immersion photolithography and dry etching processes. The color reproduction and quality are analyzed in context of the CIE color diagram, showing that a vivid and vibrant color palette, almost fully covering the sRGB color space, can be obtained with this mass-manufacturing-ready fabrication process. The obtained results, thus, provide a solid foundation for the potential industrial adoption of this emerging technology and expose the limits and challenges of the process.
展现出光学共振的纳米结构（即所谓的纳米天线）在亚波长分辨率的彩色印刷和滤波应用方面具有巨大潜力。虽然这些系统的小规模演示作为概念验证很有意思，但它们的大规模和批量制造需要更深入的分析以及进一步的开发，以便实现工业应用。在此，我们评估了使用深紫外浸没光刻和干法蚀刻工艺在12英寸晶圆上制造的大尺寸纳米天线阵列所产生的颜色质量。在CIE色图的背景下对颜色再现和质量进行了分析，结果表明，通过这种可用于大规模制造的工艺，可以获得几乎完全覆盖sRGB颜色空间的鲜艳且充满活力的调色板。因此，所获得的结果为这项新兴技术的潜在工业应用奠定了坚实基础，并揭示了该工艺的局限性和挑战。
