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在WS玻璃晶圆上生长的连续单晶氮化镓薄膜。

Continuous Single-Crystalline GaN Film Grown on WS -Glass Wafer.

作者信息

Yin Yue, Liu Bingyao, Chen Qi, Chen Zhaolong, Ren Fang, Zhang Shuo, Liu Zhetong, Wang Rong, Liang Meng, Yan Jianchang, Sun Jingyu, Yi Xiaoyan, Wei Tongbo, Wang Junxi, Li Jinmin, Liu Zhongfan, Gao Peng, Liu Zhiqiang

机构信息

Research and Development Center for Semiconductor Lighting Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China.

Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China.

出版信息

Small. 2022 Oct;18(41):e2202529. doi: 10.1002/smll.202202529. Epub 2022 Aug 20.

Abstract

Use of 2D materials as buffer layers has prospects in nitride epitaxy on symmetry mismatched substrates. However, the control of lattice arrangement via 2D materials at the heterointerface presents certain challenges. In this study, the epitaxy of single-crystalline GaN film on WS -glass wafer is successfully performed by using the strong polarity of WS buffer layer and its perfectly matching lattice geometry with GaN. Furthermore, this study reveals that the first interfacial nitrogen layer plays a crucial role in the well-constructed interface by sharing electrons with both Ga and S atoms, enabling the single-crystalline stress-free GaN, as well as a violet light-emitting diode. This study paves a way for the heterogeneous integration of semiconductors and creates opportunities to break through the design and performance limitations, which are induced by substrate restriction, of the devices.

摘要

将二维材料用作缓冲层在对称不匹配衬底上的氮化物外延方面具有前景。然而,通过二维材料在异质界面处控制晶格排列存在一定挑战。在本研究中,利用WS缓冲层的强极性及其与GaN完美匹配的晶格几何结构,成功地在WS -玻璃衬底上进行了单晶GaN薄膜的外延生长。此外,本研究表明,第一个界面氮层通过与Ga和S原子共享电子,在构建良好的界面中起着关键作用,从而实现了单晶无应力GaN以及紫光发光二极管。本研究为半导体的异质集成铺平了道路,并创造了突破由衬底限制引起的器件设计和性能限制的机会。

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