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确定湿转移石墨烯上III族氮化物半导体的优选外延。

Determination of the preferred epitaxy for III-nitride semiconductors on wet-transferred graphene.

作者信息

Liu Fang, Wang Tao, Gao Xin, Yang Huaiyuan, Zhang Zhihong, Guo Yucheng, Yuan Ye, Huang Zhen, Tang Jilin, Sheng Bowen, Chen Zhaoying, Liu Kaihui, Shen Bo, Li Xin-Zheng, Peng Hailin, Wang Xinqiang

机构信息

State Key Laboratory for Mesoscopic Physics and Frontiers Science Center for Nano-optoelectronics, School of Physics, Peking University, Beijing 100871, China.

Electron Microscopy Laboratory, School of Physics, Peking University, Beijing 100871, China.

出版信息

Sci Adv. 2023 Aug 2;9(31):eadf8484. doi: 10.1126/sciadv.adf8484.

Abstract

Transferred graphene provides a promising III-nitride semiconductor epitaxial platform for fabricating multifunctional devices beyond the limitation of conventional substrates. Despite its tremendous fundamental and technological importance, it remains an open question on which kind of epitaxy is preferred for single-crystal III-nitrides. Popular answers to this include the remote epitaxy where the III-nitride/graphene interface is coupled by nonchemical bonds, and the quasi-van der Waals epitaxy (quasi-vdWe) where the interface is mainly coupled by covalent bonds. Here, we show the preferred one on wet-transferred graphene is quasi-vdWe. Using aluminum nitride (AlN), a strong polar III-nitride, as an example, we demonstrate that the remote interaction from the graphene/AlN template can inhibit out-of-plane lattice inversion other than in-plane lattice twist of the nuclei, resulting in a polycrystalline AlN film. In contrast, quasi-vdWe always leads to single-crystal film. By answering this long-standing controversy, this work could facilitate the development of III-nitride semiconductor devices on two-dimensional materials such as graphene.

摘要

转移的石墨烯为制造超越传统衬底限制的多功能器件提供了一个很有前景的III族氮化物半导体外延平台。尽管其具有巨大的基础和技术重要性,但对于单晶III族氮化物而言哪种外延方式更优仍是一个悬而未决的问题。对此常见的答案包括远程外延(其中III族氮化物/石墨烯界面通过非化学键耦合)以及准范德华外延(quasi-vdWe,其中界面主要通过共价键耦合)。在此,我们表明在湿法转移的石墨烯上更优的是准范德华外延。以强极性III族氮化物氮化铝(AlN)为例,我们证明来自石墨烯/AlN模板的远程相互作用除了会导致核的面内晶格扭曲外,还会抑制面外晶格反转,从而产生多晶AlN薄膜。相比之下,准范德华外延总是会产生单晶薄膜。通过解决这一长期存在的争议,这项工作可以促进在诸如石墨烯等二维材料上的III族氮化物半导体器件的发展。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8f2b/10396303/90c152bfa07b/sciadv.adf8484-f1.jpg

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