Yen Yu-Hsin, Hsu Chao-Shin, Lei Zheng-Yan, Wang Hsin-Jou, Su Ching-Yuan, Dai Ching-Liang, Tsai Yao-Chuan
Department of Bio-Industrial Mechatronics Engineering, National Chung Hsing University, Taichung City 402, Taiwan.
Smart Sustainable New Agriculture Research Center (SMARTer), Taichung City 402, Taiwan.
Micromachines (Basel). 2022 Jul 29;13(8):1220. doi: 10.3390/mi13081220.
In intelligent manufacturing and robotic technology, various sensors must be integrated with equipment. In addition to traditional sensors, stretchable sensors are particularly attractive for applications in robotics and wearable devices. In this study, a piezoresistive stretchable strain sensor based on laser-induced graphene (LIG) was proposed and developed. A three-dimensional, porous LIG structure fabricated from polyimide (PI) film using laser scanning was used as the sensing layer of the strain sensor. Two LIG pattern structures (parallel and vertical) were fabricated and integrated within the LIG strain sensors. Scanning electron microscopy, an X-ray energy dispersive spectrometer, and Raman scattering spectroscopy were used to examine the microstructure of the LIG sensing layer. The performance and strain sensing properties of the parallel and vertical stretchable LIG strain sensors were investigated in tensile tests. The relative resistance changes and the gauge factors of the parallel and vertical LIG strain sensors were quantified. The parallel strain sensor achieved a high gauge factor of 15.79 in the applied strain range of 10% to 20%. It also had high sensitivity, excellent repeatability, good durability, and fast response times during the tensile experiments. The developed LIG strain sensor can be used for the real-time monitoring of human motions such like finger bending, wrist bending, and throat swallowing.
在智能制造和机器人技术中，各种传感器必须与设备集成。除了传统传感器外，可拉伸传感器在机器人技术和可穿戴设备中的应用特别具有吸引力。在本研究中，提出并开发了一种基于激光诱导石墨烯（LIG）的压阻式可拉伸应变传感器。使用激光扫描由聚酰亚胺（PI）薄膜制成的三维多孔LIG结构用作应变传感器的传感层。制作了两种LIG图案结构（平行和垂直）并集成到LIG应变传感器中。使用扫描电子显微镜、X射线能量色散光谱仪和拉曼散射光谱仪来检查LIG传感层的微观结构。在拉伸试验中研究了平行和垂直可拉伸LIG应变传感器的性能和应变传感特性。对平行和垂直LIG应变传感器的相对电阻变化和应变片系数进行了量化。平行应变传感器在10%至20%的施加应变范围内实现了15.79的高应变片系数。在拉伸实验中，它还具有高灵敏度、出色的重复性、良好的耐久性和快速的响应时间。所开发的LIG应变传感器可用于实时监测人体运动，如手指弯曲、手腕弯曲和喉咙吞咽。
