Wu Hsing-Yu, Lin Hung-Chun, Hung Guan-Yi, Tu Chi-Shun, Liu Ting-Yu, Hong Chung-Hung, Yu Guoyu, Hsu Jin-Cherng
System Manufacturing Center, National Chung-Shan Institute of Science and Technology, New Taipei City 237209, Taiwan.
Center for Astronomical Physics and Engineering, Department of Optics and Photonics, National Central University, Taoyuan City 320317, Taiwan.
Nanomaterials (Basel). 2022 Aug 10;12(16):2742. doi: 10.3390/nano12162742.
Surface-enhanced Raman spectroscopy (SERS) is commonly used for super-selective analysis through nanostructured silver layers in the environment, food quality, biomedicine, and materials science. To fabricate a high-sensitivity but a more accessible device of SERS, DC magnetron sputtering technology was used to realize high sensitivity, low cost, a stable deposition rate, and rapid mass production. This study investigated various thicknesses of a silver film ranging from 3.0 to 12.1 nm by field emission scanning electron microscope, X-ray diffraction, and X-ray photoelectron spectroscopy. In the rhodamine 6G (R6G) testing irradiated by a He-Ne laser beam, the analytical enhancement factor (AEF) of 9.35 × 10, the limit of detection (LOD) of 10 M, and the relative standard deviation (RSD) of 1.61% were better than the other SERS substrates fabricated by the same DC sputtering process because the results showed that the 6 nm thickness silver layer had the highest sensitivity, stability, and lifetime. The paraquat and acetylcholine analytes were further investigated and high sensitivity was also achievable. The proposed SERS samples were evaluated and stored in a low humidity environment for up to forty weeks, and no spectrum attenuation could be detected. Soon, the proposed technology to fabricate high sensitivity, repeatability, and robust SERS substrate will be an optimized process technology in multiple applications.
表面增强拉曼光谱（SERS）通常用于通过环境、食品质量、生物医学和材料科学中的纳米结构银层进行超选择性分析。为了制造一种高灵敏度但更易于使用的SERS装置，采用直流磁控溅射技术来实现高灵敏度、低成本、稳定的沉积速率和快速大规模生产。本研究通过场发射扫描电子显微镜、X射线衍射和X射线光电子能谱研究了厚度范围为3.0至12.1nm的银膜。在氦氖激光束照射下的罗丹明6G（R6G）测试中，9.35×10的分析增强因子（AEF）、10M的检测限（LOD）和1.61%的相对标准偏差（RSD）优于通过相同直流溅射工艺制造的其他SERS基底，因为结果表明6nm厚的银层具有最高的灵敏度、稳定性和寿命。进一步研究了百草枯和乙酰胆碱分析物，也可实现高灵敏度。对所提出的SERS样品进行了评估，并在低湿度环境中储存长达四十周，未检测到光谱衰减。很快，所提出的制造高灵敏度、可重复性和坚固的SERS基底的技术将成为多种应用中的优化工艺技术。
