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利用旋涂技术控制ZnO纳米薄膜的表面形态

Controlling the Surface Morphology of ZnO Nano-Thin Film Using the Spin Coating Technique.

作者信息

Elsayed I A, Afify Ahmed S

机构信息

Department of Physics, Faculty of Science, Damietta University, New Damietta 34517, Egypt.

Department of Basic Sciences, The Higher Institute for Engineering, Automotive Technology and Energy, New Heliopolis 11829, Egypt.

出版信息

Materials (Basel). 2022 Sep 5;15(17):6178. doi: 10.3390/ma15176178.

DOI:10.3390/ma15176178
PMID:36079559
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9458145/
Abstract

Zinc oxide (ZnO) thin films are significant in various electronic applications. This study introduced an efficient, simple, low cost and timesaving method to obtain an extended and uniform ZnO thin film with tunable surface morphology over the substrate using the spin coating technique. Different concentrations of zinc acetate dehydrate were used as precursor solutions mixed with polyvinyl alcohol as a binding polymer to obtain the film's uniformity and to relieve thermal expansion that may cause a wrinkled surface. Synthesized films were characterized using X-ray diffraction (XRD), X-ray spectroscopy (XPS), scanning electron microscopy (SEM), atomic force microscopy (AFM) and ellipsometry. Findings show that the average size of ZnO particles was less than 50 nm in a uniform film over the whole substrate area regardless of the presence or absence of wrinkles. Additionally, this method was quite fast, attaining the desired viscosity in less than one hour in comparison with the time-consuming aging method, which requires approximately 24 h to achieve the required viscosity.

摘要

氧化锌(ZnO)薄膜在各种电子应用中具有重要意义。本研究介绍了一种高效、简单、低成本且省时的方法,通过旋涂技术在基底上获得具有可调节表面形貌的扩展且均匀的ZnO薄膜。使用不同浓度的醋酸锌二水合物作为前驱体溶液,并与聚乙烯醇作为粘结聚合物混合,以获得薄膜的均匀性并缓解可能导致表面起皱的热膨胀。使用X射线衍射(XRD)、X射线光谱(XPS)、扫描电子显微镜(SEM)、原子力显微镜(AFM)和椭偏仪对合成的薄膜进行表征。结果表明,无论有无皱纹,在整个基底区域的均匀薄膜中,ZnO颗粒的平均尺寸均小于50nm。此外,该方法速度相当快,与耗时的老化方法相比,在不到一小时内就能达到所需的粘度,而老化方法大约需要24小时才能达到所需粘度。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f1e5/9458145/e6075dd5de8b/materials-15-06178-g011.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f1e5/9458145/29db0aa09987/materials-15-06178-g008.jpg
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