Annu Int Conf IEEE Eng Med Biol Soc. 2022 Jul;2022:3089-3092. doi: 10.1109/EMBC48229.2022.9871364.
Polycarbonate is a polymer that has been widely used including medical application due to its useful properties. It has high temperature resistance, biocompatibility, transparency and low water absorption rate, which are needful characteristics for packaging material of implantable neural prosthetic devices. In this study, we investigated fabrication of neural electrode with polycarbonate film using standard photolithography process and heated hydraulic press for thermal lamination. First, oxygen plasma surface treatment was performed to increase the adhesion between metal and polycarbonate film. Then thin layer of titanium and gold layer were deposited. Metal layer is patterned through standard photolithography techniques. After completing the metal patterning, thermal lamination was performed with site opened polycarbonate film.
聚碳酸酯是一种聚合物，由于其有用的特性，已被广泛应用，包括在医学领域。它具有耐高温、生物相容性、透明度和低吸水率等特点，这些都是可植入神经修复设备包装材料所需要的特性。在这项研究中，我们使用标准光刻工艺和热液压机进行热层压，研究了用聚碳酸酯薄膜制作神经电极的方法。首先，进行了氧气等离子体表面处理，以增加金属和聚碳酸酯薄膜之间的附着力。然后沉积了一层薄薄的钛和金层。通过标准光刻技术对金属层进行图案化。完成金属图案化后，用开有孔的聚碳酸酯薄膜进行热层压。
