Zhang Xuhui, Wu Chonglin, Chen Lei, Chen Gengliang, Zheng Guoliang
Sino-German College of Intelligent Manufacturing, Shenzhen Technology University, Shenzhen 518118, China.
School of Mechanical Engineering, Dongguan University of Technology, Dongguan 523830, China.
Micromachines (Basel). 2022 Oct 12;13(10):1719. doi: 10.3390/mi13101719.
Free-form optical elements face significant challenges in high-precision measurement due to their high complexity and non-rotational symmetry. Digital holographic microscopy (DHM), as one of the methods for the measurement of free-form optical elements, has promising applications due to its ultra-high precision and non-destructive and fast characteristics. Therefore, we have designed a novel measurement method that combines transmission DHM and reflection DHM to obtain thickness information and surface information of elements to deduce the 3D structure. With this method, we completed the measurement of a free-form optical element. The DHM system we built has recorded holograms under 4× and 20× objectives and successfully recovered the 3D surface shape of the element. The measurements are consistent with the designed and manufactured parameters, demonstrating the unique advantages of DHM for measuring special types of optical elements.
自由曲面光学元件由于其高度复杂性和非旋转对称性，在高精度测量上面临重大挑战。数字全息显微镜（DHM）作为测量自由曲面光学元件的方法之一，因其超高精度、无损和快速的特点而具有广阔的应用前景。因此，我们设计了一种将透射式DHM和反射式DHM相结合的新型测量方法，以获取元件的厚度信息和表面信息，从而推断出三维结构。通过这种方法，我们完成了对一个自由曲面光学元件的测量。我们构建的DHM系统在4倍和20倍物镜下记录了全息图，并成功恢复了该元件的三维表面形状。测量结果与设计和制造参数一致，证明了DHM在测量特殊类型光学元件方面的独特优势。
