Pellegrino Anna L, Lo Presti Francesca, Smecca Emanuele, Valastro Salvatore, Greco Giuseppe, Di Franco Salvatore, Roccaforte Fabrizio, Alberti Alessandra, Malandrino Graziella
Dipartimento di Scienze Chimiche, Università degli Studi di Catania, INSTM UdR Catania, Viale Andrea Doria 6, 95125 Catania, Italy.
National Research Council-Institute for Microelectronics and Microsystems (CNR-IMM), Zona Industriale Strada VIII No. 5, 95121 Catania, Italy.
Materials (Basel). 2022 Nov 4;15(21):7790. doi: 10.3390/ma15217790.
Copper oxide thin films have been successfully synthesized through a metal-organic chemical vapor deposition (MOCVD) approach starting from the copper bis(2,2,6,6-tetramethyl-3,5-heptanedionate), Cu(tmhd), complex. Operative conditions of fabrication strongly affect both the composition and morphologies of the copper oxide thin films. The deposition temperature has been accurately monitored in order to stabilize and to produce, selectively and reproducibly, the two phases of cuprite CuO and/or tenorite CuO. The present approach has the advantages of being industrially appealing, reliable, and fast for the production of thin films over large areas with fine control of both composition and surface uniformity. Moreover, the methylammonium lead iodide (MAPI) active layer has been successfully deposited on the ITO/CuO substrate by the Low Vacuum Proximity Space Effusion (LV-PSE) technique. X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), and atomic force microscopy (AFM) analyses have been used to characterize the deposited films. The optical band gap (E), ranging from 1.99 to 2.41 eV, has been determined through UV-vis analysis, while the electrical measurements allowed to establish the p-type conductivity behavior of the deposited CuO thin films with resistivities from 31 to 83 Ω cm and carrier concentration in the order of 1.5-2.8 × 10 cm. These results pave the way for potential applications of the present system as a hole transporting layer combined with a perovskite active layer in emergent solar cell technologies.
通过金属有机化学气相沉积(MOCVD)方法,以双(2,2,6,6 - 四甲基 - 3,5 - 庚二酮)铜(Cu(tmhd))配合物为原料,成功合成了氧化铜薄膜。制备的操作条件对氧化铜薄膜的成分和形貌都有很大影响。精确监测沉积温度,以便稳定地、选择性且可重复地制备出铜的两种氧化物相,即赤铜矿Cu₂O和/或黑铜矿CuO。本方法具有工业吸引力、可靠性高、速度快等优点,可在大面积上制备薄膜,同时能精细控制成分和表面均匀性。此外,通过低真空近距离空间蒸发(LV - PSE)技术,已成功将甲基铵碘化铅(MAPI)活性层沉积在ITO/CuO衬底上。利用X射线衍射(XRD)、场发射扫描电子显微镜(FE - SEM)和原子力显微镜(AFM)分析对沉积薄膜进行了表征。通过紫外 - 可见光谱分析确定了光学带隙(E)在1.99至2.41 eV范围内,而电学测量表明沉积的CuO薄膜具有p型导电行为,电阻率在31至83Ω·cm之间,载流子浓度约为1.5 - 2.8×10¹⁹ cm⁻³。这些结果为该系统在新兴太阳能电池技术中作为与钙钛矿活性层结合的空穴传输层的潜在应用铺平了道路。