Department of NanoBiophotonics, Max Planck Institute for Multidisciplinary Sciences, Am Faßberg 11, 37077 Göttingen, Germany.
Sensors (Basel). 2022 Nov 3;22(21):8465. doi: 10.3390/s22218465.
Deformable mirrors enable the control of wave fronts for the compensation of aberrations in optical systems and/or for beam scanning. Manufacturers of deformable mirrors typically provide calibration data that encode for the fabrication tolerances among the actuators and mirror segments to support open-loop control with high wave front fidelity and accuracy. We report a calibration method that enables users of the deformable mirrors to measure the response of the mirror itself to validate and improve the calibration data. For this purpose, an imaging off-axis Michelson interferometer was built that allowed measuring the mirror topography with high accuracy and sufficient spatial resolution. By calibrating each actuator over its entire range, the open-loop performance for our deformable mirror was improved.
变形反射镜可用于控制波前，以补偿光学系统中的像差和/或实现光束扫描。变形反射镜制造商通常会提供校准数据，这些数据编码了致动器和反射镜段之间的制造公差，以支持具有高波前保真度和精度的开环控制。我们报告了一种校准方法，使用该方法，变形反射镜的用户可以测量反射镜本身的响应，以验证和改进校准数据。为此，我们构建了一个离轴成像 Michelson 干涉仪，该干涉仪可以高精度和足够的空间分辨率测量反射镜的形貌。通过对每个致动器在其整个范围内进行校准，我们的变形反射镜的开环性能得到了改善。
