School of Micro-Nano Electronics, ZJU-Hangzhou Global Scientific and Technological Innovation Center, ZJU-UIUC Joint Institute, State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027, China.
Sensors (Basel). 2022 Nov 30;22(23):9341. doi: 10.3390/s22239341.
Charge-coupled devices (CCD) allow imaging by photodetection, charge integration, and serial transfer of the stored charge packets from multiple pixels to the readout node. The functionality of CCD can be extended to the non-destructive and in-situ readout of the integrated charges by replacing metallic electrodes with graphene in the metal-oxide-semiconductors (MOS) structure of a CCD pixel. The electrostatic capacitive coupling of graphene with the substrate allows the Fermi level tuning that reflects the integrated charge density in the depletion well. This work demonstrates the in-situ monitoring of the serial charge transfer and interpixel transfer losses in a reciprocating manner between two adjacent Gr-Si CCD pixels by benefitting the electrostatic and gate-to-gate couplings. We achieved the maximum charge transfer efficiency () of 92.4%, which is mainly decided by the inter-pixel distance, phase clock amplitudes, switching slopes, and density of surface defects. The discussion on overcoming transfer losses and improving by realizing a graphene-electron multiplication CCD is also presented. The proof of the concept of the in-situ readout of the out-of-plane avalanche in a single Gr-Si CCD pixel is also demonstrated, which can amplify the photo packet in a pre-transfer manner.
电荷耦合器件 (CCD) 通过光检测、电荷积分和存储在多个像素中的电荷包从读出节点的串行传输来实现成像。通过用石墨烯替代 CCD 像素的金属-氧化物-半导体 (MOS) 结构中的金属电极,可以将 CCD 的功能扩展为对集成电荷的非破坏性和原位读出。石墨烯与衬底的静电电容耦合允许调整费米能级,从而反映耗尽阱中的集成电荷密度。这项工作通过受益于静电和栅极到栅极耦合,以往复的方式在两个相邻的 Gr-Si CCD 像素之间原位监测串行电荷传输和像素间传输损耗。我们实现了最大电荷传输效率()为 92.4%,这主要由像素间距离、相时钟幅度、开关斜率和表面缺陷密度决定。还讨论了通过实现石墨烯电子倍增 CCD 来克服传输损耗和提高的方法。还证明了在单个 Gr-Si CCD 像素中进行面外雪崩的原位读出的概念验证,该方法可以在预传输的方式下放大光包。