Knobloch Theresia, Uzlu Burkay, Illarionov Yury Yu, Wang Zhenxing, Otto Martin, Filipovic Lado, Waltl Michael, Neumaier Daniel, Lemme Max C, Grasser Tibor
Institute for Microelectronics, TU Wien, Vienna, Austria.
AMO GmbH, Aachen, Germany.
Nat Electron. 2022;5(6):356-366. doi: 10.1038/s41928-022-00768-0. Epub 2022 Jun 2.
Electronic devices based on two-dimensional semiconductors suffer from limited electrical stability because charge carriers originating from the semiconductors interact with defects in the surrounding insulators. In field-effect transistors, the resulting trapped charges can lead to large hysteresis and device drifts, particularly when common amorphous gate oxides (such as silicon or hafnium dioxide) are used, hindering stable circuit operation. Here, we show that device stability in graphene-based field-effect transistors with amorphous gate oxides can be improved by Fermi-level tuning. We deliberately tune the Fermi level of the channel to maximize the energy distance between the charge carriers in the channel and the defect bands in the amorphous aluminium gate oxide. Charge trapping is highly sensitive to the energetic alignment of the Fermi level of the channel with the defect band in the insulator, and thus, our approach minimizes the amount of electrically active border traps without the need to reduce the total number of traps in the insulator.
基于二维半导体的电子器件存在电稳定性有限的问题,因为源自半导体的电荷载流子会与周围绝缘体中的缺陷相互作用。在场效应晶体管中,由此产生的俘获电荷会导致较大的滞后现象和器件漂移,尤其是在使用常见的非晶态栅极氧化物(如二氧化硅或二氧化铪)时,这会阻碍电路的稳定运行。在此,我们表明,通过费米能级调谐可以提高具有非晶态栅极氧化物的石墨烯基场效应晶体管的器件稳定性。我们特意调节沟道的费米能级,以最大化沟道中的电荷载流子与非晶态铝栅极氧化物中的缺陷带之间的能量距离。电荷俘获对沟道的费米能级与绝缘体中的缺陷带的能量对准高度敏感,因此,我们的方法在无需减少绝缘体中陷阱总数的情况下,将电活性边界陷阱的数量降至最低。