Yin Lianmin, Da Yifan, Hu Hao, Guan Chaoliang
Opt Express. 2023 Jan 2;31(1):698-713. doi: 10.1364/OE.478675.
With the development of short wavelength optics, high requirements are put forward for the full frequency errors of optical elements, while the processing efficiency and surface quality of traditional polishing methods are difficult to meet their requirements. In this paper, a fluid lubricated polishing method is proposed by combining non-Newtonian fluid with traditional polishing methods. According to Preston equation and shear thickening principle, the tool influence function of fluid lubricated polishing is established and verified by experiments. The results show that the fluid lubricated polishing has a very good convergence ability to the full frequency error of the workpiece. In addition, the convergence rate of fluid lubricated polishing on roughness is about twice that of chemical mechanical polishing. Finally, fluid lubricated polishing extends Preston from Newtonian fluid polishing to non-Newtonian fluid polishing.
随着短波长光学的发展，对光学元件的全频率误差提出了很高的要求，而传统抛光方法的加工效率和表面质量难以满足其要求。本文提出了一种将非牛顿流体与传统抛光方法相结合的流体润滑抛光方法。根据普雷斯顿方程和剪切增稠原理，建立了流体润滑抛光的工具影响函数，并通过实验进行了验证。结果表明，流体润滑抛光对工件的全频率误差具有很好的收敛能力。此外，流体润滑抛光在粗糙度上的收敛速度约为化学机械抛光的两倍。最后，流体润滑抛光将普雷斯顿从牛顿流体抛光扩展到非牛顿流体抛光。
