Li Yucheng, Zhou Xiaoqin, Wang Guilian, Ma Peiqun, Wang Rongqi
School of Mechanical and Aerospace Engineering, Jilin University, Changchun 130022, China.
Tianjin Key Laboratory for Advanced Mechatronic System Design and Intelligent Control, Tianjin University of Technology, Tianjin 300384, China.
Micromachines (Basel). 2019 Jul 18;10(7):484. doi: 10.3390/mi10070484.
Two-dimensional vibration-assisted polishing (2D-VAP) is a new polishing approach proposed in recent years, which is considered to be very suitable for the polishing of micro-optical parts and micro-structured surfaces. The advantages of the 2D-VAP approach are as follows: A very high relative velocity can be obtained between the workpiece and the polishing tool; the desired motion trajectory can be formed in one polishing cycle. However, there are still some problems to be solved in the 2D-VAP approach, mainly involving: The vibration frequency of the resonant excitation cannot be regulated, which makes it difficult to adapt to the processing demands of different materials; the theoretical model of removal function has been studied in few papers; and motion coupling occurs easily between the horizontal and vertical directions, which affects the trajectory synthesized at the polishing tool. In order to solve these problems, a new approach to decoupled non-resonant polishing is developed in this paper, and its effectiveness is investigated by the theoretical analysis and polishing experiments. Theoretical studies of removal function show that the vibration frequency, vibration amplitude and loading force are proportional to the removal depth. The comparison of experimental and modeling results of removal function show that they have good coherence, and the correctness of the theoretical model of removal function is verified. In addition, the stability experiments of removal function prove that the polishing approach has better stability and is beneficial to the convergence of workpiece surface.
二维振动辅助抛光（2D-VAP）是近年来提出的一种新型抛光方法，被认为非常适合用于微光学零件和微结构表面的抛光。2D-VAP方法的优点如下：在工件和抛光工具之间可获得非常高的相对速度；在一个抛光周期内可形成所需的运动轨迹。然而，2D-VAP方法仍存在一些有待解决的问题，主要包括：共振激励的振动频率无法调节，这使得难以适应不同材料的加工需求；去除函数的理论模型鲜有文献研究；水平和垂直方向之间容易发生运动耦合，这会影响抛光工具合成的轨迹。为了解决这些问题，本文开发了一种去耦非共振抛光的新方法，并通过理论分析和抛光实验对其有效性进行了研究。去除函数的理论研究表明，振动频率、振动幅度和加载力与去除深度成正比。去除函数的实验结果与建模结果的比较表明，二者具有良好的一致性，验证了去除函数理论模型的正确性。此外，去除函数的稳定性实验证明该抛光方法具有较好的稳定性，有利于工件表面的收敛。
