Zhao Wenning, Lin Fan, Han Xiuxun
Institute of Optoelectronic Materials and Devices, Faculty of Materials Metallurgy and Chemistry, Jiangxi University of Science and Technology, Ganzhou 341000, China.
Nanomaterials (Basel). 2023 Jan 14;13(2):346. doi: 10.3390/nano13020346.
The replication of nano-patterns is a significant means of nanomanufacturing. However, there is still a dearth of nano-replication methods that meet the requirements of both high precision and low cost. Therefore, a new strategy to achieve the replication of nano-patterns, namely centrifugal-force-driven nano-replication (CFDNR), is proposed here. An easily obtained centrifugal force which is perpendicular to the plane of a nanostructured template is designed as a driving power, to compel the dynamic polymer to fully fill the space of the template; then, the nano-pattern can be replicated on a polymer film. Anodic aluminum oxide (AAO) templates with nanohole periods of ~450 nm and ~100 nm were employed as the original masters to investigate the nano-replication behaviors. The results of morphology measurements demonstrate excellent precision. The size deviations between the nanohole in the template and the nanopillar on the polymer film are less than 4%. Furthermore, a vacuum-assisted CFDNR scheme is proposed to prevent the formation of cavitation on the polymer replica. This work provides new possibilities and choices for facile, inexpensive and high-precision nanomanufacturing.
纳米图案的复制是纳米制造的一种重要手段。然而，仍然缺乏同时满足高精度和低成本要求的纳米复制方法。因此，本文提出了一种实现纳米图案复制的新策略，即离心力驱动纳米复制（CFDNR）。将一个易于获得的、垂直于纳米结构模板平面的离心力设计为驱动力，迫使动态聚合物完全填充模板的空间；然后，纳米图案就可以复制到聚合物薄膜上。使用纳米孔周期约为450 nm和100 nm的阳极氧化铝（AAO）模板作为原始母版来研究纳米复制行为。形态测量结果显示出优异的精度。模板中的纳米孔与聚合物薄膜上的纳米柱之间的尺寸偏差小于4%。此外，还提出了一种真空辅助CFDNR方案，以防止聚合物复制品上形成空化现象。这项工作为简便、廉价且高精度的纳米制造提供了新的可能性和选择。
