Physikalisches Institut, Karlsruhe Institute of Technology, D-76128 Karlsruhe, Germany.
Department of Physics and Astronomy, University of Potsdam, D-14476 Potsdam-Golm, Germany.
Nanotechnology. 2023 Feb 13;34(17). doi: 10.1088/1361-6528/acb654.
Electromigration in interconnects continues to be an important field of study in integrated circuits as the interconnects are planned to shrink in size at comparable pace as the semiconductor functional elements. Through shrinking the interconnects approach the regime where quantum size effects become important. The observation of quantum size and shell effects is usually restricted either to low-temperatures or vacuum conditions or to chemically inert materials such as Au. Here, we show that in electromigrated Cu nanocontacts such effects can be observed at room temperature and room pressure even in the presence of oxidation. Our data provide evidence that the nanocontacts are nearly spherical objects with a triangular-cylindrical symmetry of their electronic wave functions with a stronger free-electron-like character compared to previous results. We do not observe a detrimental effect of oxygen. The presence of shell effects has implications for the technological use of Cu nanocontacts as interconnects in integrated circuits and could lead to the use of electronic wave functions of shells in such interconnects.
电迁移在集成电路中仍然是一个重要的研究领域,因为随着半导体功能元件的尺寸不断缩小,互连的尺寸也计划以相同的速度缩小。通过缩小互连的尺寸,我们进入了量子尺寸效应变得重要的区域。量子尺寸和壳层效应的观察通常限于低温或真空条件,或者限于化学惰性材料,如 Au。在这里,我们表明,在电迁移的 Cu 纳米触点中,即使在存在氧化的情况下,这些效应也可以在室温、常压下观察到。我们的数据提供了证据,表明纳米触点是几乎球形的物体,其电子波函数具有三角形-圆柱形的对称性,与以前的结果相比,具有更强的自由电子特征。我们没有观察到氧气的有害影响。壳层效应的存在对 Cu 纳米触点作为集成电路中的互连的技术应用具有重要意义,并可能导致在这种互连中使用壳层的电子波函数。